2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) 2014
DOI: 10.1109/memsys.2014.6765573
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3D mask modules using two-photon direct laser writingtechnology for continuous lithography process on fibers

Abstract: In this paper, we report a new fabrication method of three dimensional (3D) mask modules using two-photon direct laser writing technology in 140 μm-diameter half-pipe structure on quartz substrates. For the first time, the two-photon direct laser writing technology is successfully utilized for high-resolution patterning process on a curved surface. The minimum feature sizes of about 2 μm are successfully fabricated in the 140 μm-diameter half-pipe structure. Using the new 3D mask modules, fine metal patterns a… Show more

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Cited by 2 publications
(2 citation statements)
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“…The SLA process takes into account all the sub-processes such as exposure, photoinitiation, photopolymerization, mass and heat transfer (Hayashi et al , 2014). The SLA possesses good accuracy and applies for varied application areas (Castro e Costa et al , 2017; Gao et al , 2015).…”
Section: Introductionmentioning
confidence: 99%
“…The SLA process takes into account all the sub-processes such as exposure, photoinitiation, photopolymerization, mass and heat transfer (Hayashi et al , 2014). The SLA possesses good accuracy and applies for varied application areas (Castro e Costa et al , 2017; Gao et al , 2015).…”
Section: Introductionmentioning
confidence: 99%
“…The 3D cylindrical projection photolithography technology has been introduced in detail in our previous works. [15][16][17][18] Using the new technology, various microsensors including temperature sensors, 15) electrochemical electrodes 17,18) and other functional micro structures 16) have been successfully fabricated onto fiber substrates with the outer diameter of 300 µm. In particular, the temperature microsensor is very interesting for us because it is one of the most important and basic tools for precisely monitoring the health status of living tissues and much effort has been made.…”
Section: Introductionmentioning
confidence: 99%