3D-measurement with the stereo scanning electron microscope on sub-micrometer structures

Vynnyk, Taras; Schultheis, Thanin; Fahlbusch, T.; Reithmeier, Eduard

doi:10.2971/jeos.2010.10038s

Cited by 8 publications

(5 citation statements)

References 7 publications

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“…There are many applications for 3D surface reconstruction from SEM images ( Mountains from Digital Surf, France; 3DSEM from Zeiss, Germany; MeX from Alicona, Austria; etc.). The current commercial ones are mainly geometry based, and they use the values of sample plataform rotation taken directly from the SEM interface [1,2,3,4,6]. Nonetheless, SEM experience indicates that these values accuracy is no longer guaranteed because of errors in sample positioning concerning the sample eucentric point with mechanical platforms on a micro-scale.…”

Section: Description Of the Proposementioning

confidence: 99%

Proposal for a complete 3D surface reconstruction using images from a scanning electron microscope (SEM)

Beb¹,

Dembélé²,

Bekel³

et al. 2022

Frontiers in Optics + Laser Science 2022 (FIO, LS)

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A three-dimensional model enables the development of accurate solutions to have more information about the thickness, texture, and characteristics of small-size samples for education and metrology applications. This project proposes an idea to obtain a complete 3D surface reconstruction using the application of Pollen 3D for the scanning electron microscope (SEM) images with high magnification. The main objective is to have a set of images of the complete 360° rotation of the sample with a robot inside the chamber of the SEM. Simulation SEM images with Blender (open source application) are proposed for results validation.

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Section: Description Of the Proposementioning

confidence: 99%

Proposal for a complete 3D surface reconstruction using images from a scanning electron microscope (SEM)

Beb¹,

Dembélé²,

Bekel³

et al. 2022

Frontiers in Optics + Laser Science 2022 (FIO, LS)

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“…The proposed genetic algorithm has been applied to the line profile reconstruction from the signals captured by both SE and BSE detectors. Vynnyk et al [20] proposed a PS based algorithm to 3D SEM surface reconstruction and studied the efficiency of SEM detector system towards a 3D modeling. Slowko and Krysztof [21] designed a PS-based algorithm to reconstruct the 3D surface model of SEM micrographs with the use of angular distribution of back-scattered electron emission to achieve a digital map of surface elevations.…”

Section: Introductionmentioning

confidence: 99%

Three-dimensional reconstruction of highly complex microscopic samples using scanning electron microscopy and optical flow estimation

et al. 2017

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Scanning Electron Microscope (SEM) as one of the major research and industrial equipment for imaging of micro-scale samples and surfaces has gained extensive attention from its emerge. However, the acquired micrographs still remain two-dimensional (2D). In the current work a novel and highly accurate approach is proposed to recover the hidden third-dimension by use of multi-view image acquisition of the microscopic samples combined with pre/post-processing steps including sparse feature-based stereo rectification, nonlocal-based optical flow estimation for dense matching and finally depth estimation. Employing the proposed approach, three-dimensional (3D) reconstructions of highly complex microscopic samples were achieved to facilitate the interpretation of topology and geometry of surface/shape attributes of the samples. As a byproduct of the proposed approach, high-definition 3D printed models of the samples can be generated as a tangible means of physical understanding. Extensive comparisons with the state-of-the-art reveal the strength and superiority of the proposed method in uncovering the details of the highly complex microscopic samples.

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“…2) Shape from shading method which was used first to obtain a surface height image from just a single bidimensional image of an object light-illuminated (Ikeuchi and Horn, 1981) and then, implemented for SEM images, in different versions including one or several detectors (Walker et al, 2005;Pintus et al, 2005;Drzazga et al, 2006;Pintus et al, 2008;Paluszynski and Slowko, 2008;Wzorek et al, 2009Wzorek et al, , 2010Vynnyk et al, 2010).…”

Section: ) Introductionmentioning

confidence: 99%

Uncertainty studies of topographical measurements on steel surface corrosion by 3D scanning electron microscopy

Kang

Pereda

Canafoglia

et al. 2012

Micron

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Pitting corrosion is a damage mechanism quite serious and dangerous in both carbon steel boiler tubes for power plants which are vital to most industries and stainless steels for orthopedic human implants whose demand, due to the increase of life expectation and rate of traffic accidents, has sharply increased. Reliable methods to characterize this kind of damage are becoming increasingly necessary, when trying to evaluate the advance of damage and to establish the best procedures for component inspection in order to determine remaining lives and failure mitigation. A study about the uncertainties on the topographies of corrosion pits from 3D SEM images, obtained at low magnifications (where errors are greater) and different stage tilt angles were carried out using an in-house software previously developed. Additionally, measurements of pit depths on biomaterial surfaces, subjected to two different surface treatments on stainless steels, were carried out. The different depth distributions observed were in agreement with electrochemical measurements.

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3D-measurement with the stereo scanning electron microscope on sub-micrometer structures

Cited by 8 publications

References 7 publications

Proposal for a complete 3D surface reconstruction using images from a scanning electron microscope (SEM)

Proposal for a complete 3D surface reconstruction using images from a scanning electron microscope (SEM)

Three-dimensional reconstruction of highly complex microscopic samples using scanning electron microscopy and optical flow estimation

Uncertainty studies of topographical measurements on steel surface corrosion by 3D scanning electron microscopy

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