3D micro-inspection goes DMD

Bitte, Frank; Dussler, G.; Pfeifer, Tilo

doi:10.1016/s0143-8166(01)00037-9

Cited by 26 publications

(19 citation statements)

References 3 publications

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“…The white light confocal microscope was then proposed to measure one area profile at a time in conjunction with digital image processing technique. However, in order to detect the whole surface profile one more scanning principle has to be added, such as the point scan by rotating a Nipkow disk (Jordany, 1998) or the structure light projection method with DMD (Bitte, 2001). A low cost confocal microscope probe for area detection has been developed .…”

Section: Confocal Microscopementioning

confidence: 99%

Probe Technologies for Micro/Nano Measurements

Fan¹,

Fang²,

Chen³

et al. 2010

Cutting Edge Nanotechnology

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Section: Confocal Microscopementioning

confidence: 99%

Probe Technologies for Micro/Nano Measurements

Fan¹,

Fang²,

Chen³

et al. 2010

Cutting Edge Nanotechnology

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“…A spinning Nipkow disc is frequently used there in order to do the time-multiplexing for the pin-holes that cover the field of view during a camera frame. Recent work has been reported that introduces the digital micromirror device as a well suited and flexible alternative for the Nipkow disk 15,16,17 . The spinning aperture disk can be replaced by a dynamic pattern of sub-apertures that change rapidly.…”

Section: Confocal Microscopymentioning

confidence: 99%

ALP: universal DMD controller for metrology and testing

Hoefling¹,

Ahl²

2004

SPIE Proceedings

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The paper presents a current development in the field of high-speed spatial light modulators. The Digital Micromirror Device (DMD) developed and produced by Texas Instruments Inc. (TI) stimulated new approaches in photonics. Recently, TI introduced the Discovery general purpose chipset to support new business areas in addition to the mainstream application of DMD technology in digital projection. ViALUX developed the ALP parallel interface controller board as a Discovery 1100 accessory for high speed micromirror operation. ALP (Accessory Light Modulator Package) has been designed for use in optical metrology but is widely open for numerous applications. It allows for rapid launch into new DMD applications and can be integrated instantly into existing systems or may initiate new developments. The paper describes both, the general hardware architecture and the software concept of the new high-speed controller solution. Binary and gray-value patterns of variable bit-depth can be pre-loaded to on-board SDRAM via USB and transferred to DMD at high speed (up to 6900 XGA frames per second). Three examples are to illustrate how the approach enables advanced applications of DMD technology in metrology, testing and beyond.

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“…Confocal microscopy (CM) in its different implementations [11][12][13][14][15] can be much faster than WLI in terms of depth scan, because there is no scanning of a high-frequency carrier signal necessary. So CM might be a candidate for high speed measurement, however, CM displays a few drawbacks discussed below.…”

Section: Introductionmentioning

confidence: 99%

Better 3D inspection with structured illumination: signal formation and precision

2015

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3D metrology faces increasing demands for higher precision and larger space-bandwidth-speed product (number of 3D points/s). In this paper we consider structured-illumination microscopy as a means for satisfying these demands, developing a theoretical model of the signal formation for both optically smooth and optically rough surfaces. The model allows us to investigate physical limits on precision and to establish rules that allow sensor parameter optimization for greatest precision or highest speed.

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3D micro-inspection goes DMD

Cited by 26 publications

References 3 publications

Probe Technologies for Micro/Nano Measurements

Probe Technologies for Micro/Nano Measurements

ALP: universal DMD controller for metrology and testing

Better 3D inspection with structured illumination: signal formation and precision

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