2015
DOI: 10.17265/2328-2223/2015.01.001
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3D Multi-gate Transistors: Concept, Operation, and Fabrication

Abstract: Abstract:The multi-gate transistors such as Fin-FETs, Tri-gate FETs, and Gate-all-around (GAA) FETs are remarkable breakthrough in the electronic industry. 3D Transistor is taking the place of the conventional 2D planar transistor for many reasons. 3D transistors afford more scalability, energy efficient performance than planar transistors and increase the control on the channel region to reduce the short channel effect, which enables us to extend Moore's law to further extent. In this paper, we will present a… Show more

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Cited by 8 publications
(5 citation statements)
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References 17 publications
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“…Park et al 34 presented their experimental findings on a multichannel double‐gate MOSFET. The concept, operation, and fabrication feasibility of 3D‐multi‐gate transistors were discussed by Shehata et al 35 Emam et al 36 conducted experimental investigations into the performance of a graded channel MOSFET. Larson et al 37 conducted experimental studies on SB MOSFETs.…”
Section: Device Structure Simulation and Fabricationmentioning
confidence: 99%
“…Park et al 34 presented their experimental findings on a multichannel double‐gate MOSFET. The concept, operation, and fabrication feasibility of 3D‐multi‐gate transistors were discussed by Shehata et al 35 Emam et al 36 conducted experimental investigations into the performance of a graded channel MOSFET. Larson et al 37 conducted experimental studies on SB MOSFETs.…”
Section: Device Structure Simulation and Fabricationmentioning
confidence: 99%
“…Park et al [24] has experimentally reported a multichannel tri‐gate MOSFET. Shehata et al [25] has discussed the concept, operation, and fabrication feasibility of 3D‐multi gate transistors. Emam et al [26] has experimentally investigated the noise performance in a graded channel MOSFET.…”
Section: Introductionmentioning
confidence: 99%
“…These fields often vary spatially as can be seen, e.g., for modern transistors that have 3D architectures with different doping levels-and hence depletion region widths-in various directions. [6,7] Moreover, the lateral dimensions of these doped regions are becoming increasingly small. [6] In batteries, for example, potentials that limit or induce electron or ion transport, drop over the so-called Debye-length, extending over nanometers to hundreds of nanometers.…”
Section: Introductionmentioning
confidence: 99%