1997 Proceedings 47th Electronic Components and Technology Conference
DOI: 10.1109/ectc.1997.606332
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3D packaging solutions for a silicon micropump

Abstract: A novel microsystem incorporating a micromachined silicon membrane pump, packaged in a 3D MCM-V package is described. Finite element techniques are used to analyse the encapsulation stress in the assembled structure and the silicon membrane. The design of the silicon chip carrier substrates is improved by modifying the design of the cutting windows to reduce the risk of cracking. A combination of numerical and analytical techniques are used to deduce limits for the maximum permissible dimensions of the membran… Show more

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Cited by 2 publications
(1 citation statement)
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“…Developed primarily for military and space applications by companies such as Irvine Sensors Corporation, USA and 3D Plus, France, these super stacks are now found in micrccameras for satellites[l7, 18,19]. NMRC's experience in 3D packaging stems from involvement in the EU funded TRIMOD and BARMINT projects [20,21,22].…”
Section: -D Packagingmentioning
confidence: 98%
“…Developed primarily for military and space applications by companies such as Irvine Sensors Corporation, USA and 3D Plus, France, these super stacks are now found in micrccameras for satellites[l7, 18,19]. NMRC's experience in 3D packaging stems from involvement in the EU funded TRIMOD and BARMINT projects [20,21,22].…”
Section: -D Packagingmentioning
confidence: 98%