３方向カンチレバーを用いた多軸触覚センサの作製と基礎特性

Tachibana, Hiroto; Kamanaru, S.; Mima, Takashi; Sohgawa, Masayuki; Kanashima, Takeshi; Okuyama, Masanori; Yamashita, K.; Noda, Minoru; Noma, Hiroyasu; Higuchi, Masayoshi

doi:10.1541/ieejsmas.130.223

Cited by 23 publications

(12 citation statements)

References 6 publications

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“…When normal load is applied, strain gage resistance decreases in all three cantilevers on the chip so that the normal load can be detected. On the other hand, when shear load is applied, resistance in the symmetrically arranged cantilevers changes differently depending on the load direction; magnitude and direction of the share load can be detected by combining respective resistance changes . Besides, it was shown experimentally that normal load and shear load can be detected separately .…”

Section: Construction and Detection Principle Of Mems Multiaxials Tacmentioning

confidence: 99%

Electromotive Manipulator Control by Detection of Proximity, Contact, and Slipping Using MEMS Multiaxial Tactile Sensor

Araki

Abe

Noma

et al. 2018

Electrical Engineering Japan

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SUMMARY In this paper, we have demonstrated usefulness of the electromotive manipulator system with a developed single element MEMS sensor which can detect proximity, contact, and slipping to skillful gripping of the object. This MEMS sensor can detect proximity as impedance change of Si substrate by reflected light from the object due to the photoconductive effect. In addition, both normal and shear load can be also detected as resistance change of strain gage on cantilevers located threefold symmetry and embedded in polydimethylsiloxane (PDMS). By attaching the sensor on the electromotive manipulator, accurate control of gripping force was enabled by feedback of the sensor output.

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Section: Construction and Detection Principle Of Mems Multiaxials Tacmentioning

confidence: 99%

Electromotive Manipulator Control by Detection of Proximity, Contact, and Slipping Using MEMS Multiaxial Tactile Sensor

Araki

Abe

Noma

et al. 2018

Electrical Engineering Japan

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“…On the other hand, it is reported that some NiCr thin films show a near-zero or negative value of TCR in the case of around a 5:5 composition ratio, (13) and we have a confirmed experimentally that the Cr-50% NiCr thin film which is used in this work has a negative TCR. (14) It is considered that an amorphous crystal structure causes this behavior. In our previous work, it has been shown by using an x-ray diffraction method that a deposited NiCr film become an amorphous crystal structure.…”

Section: Principle Of Visual Sensingmentioning

confidence: 99%

“…In our previous work, it has been shown by using an x-ray diffraction method that a deposited NiCr film become an amorphous crystal structure. (14) In addition, the impedance change for temperature is considerably larger than the resistance change for temperature. The sensitivity of the impedance for the temperature of the Si substrate ranges from about 0.3 to 1.5%/°C.…”

Section: Principle Of Visual Sensingmentioning

confidence: 99%

Texture Characterization Including Warm/Cool Sensation using Force-, Light-, and Temperature-Sensitive Microelectromechanical Systems Sensor

2017

Sensors and Materials

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In this paper, we report on texture measurements for an object, including tactile, warm/cool, and light sensations using a multimodal micro-electromechanical systems (MEMS) sensor. This MEMS sensor can detect force as a resistance change of the strain gauge on a microcantilever and light as an impedance change of a Si layer by a photoconductive effect. The sensor, which was maintained near human body temperature using a heater, can also detect a temperature drop after heat transfer from the sensor to a contacted object as a resistance change of the strain gauge or an impedance change of the Si layer. In this work, three different materials (copper, acrylic, and wood) were chosen as the target objects for the measurement of surface texture, and they were characterized on the basis of the differences in sensor outputs in active sensing experiments (approaching and pressing of the sensor with a probe light) on the sensor surface. In the proximity process, the impedance change of the Si layer depends on the surface reflectivity of the objects. After the object is touched by the sensor surface, the impedance of the Si layer and the resistance of the strain gauge of the sensor increase with the change in temperature caused by heat transfer. Furthermore, the resistance of the strain gauge decreases with the deformation of the cantilever caused by the pressing force from each object. Therefore, it is demonstrated that surface texture including the mechanical, optical, and thermal characteristics of various materials can be evaluated by active sensing using the proposed MEMS multimodal sensor.

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“…where k x , k y , and k z are coefficients showing the sensitivities of the cantilever to F x , F y , and F z , respectively. 30) The ratio obtained from three differently directed cantilevers, have different sensitivities to force in each axis, and are shown as…”

Section: Structure and Detection Principle Of The Tactile Sensormentioning

confidence: 99%

Fabrication and Noise Reduction of the Miniature Tactile Sensor Using Through-Silicon-Via Connection with Signal Amplifier

Yokoyama

Sohgawa

Kanashima

et al. 2013

Jpn. J. Appl. Phys.

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A miniature tactile sensor has been fabricated by connecting stress-sensitive part with an amplifier of integrated circuit through through-silicon-via (TSV) electrically. The sensitive part consists of three warped cantilevers with piezoresistive NiCr thin film which are prepared on a silicon-on-insulator wafer by the surface micromachining technique. The TSV connection can reduce noise of detected change of the piezoresistive output induced by wire between the sensitive part and the amplifier. Fabricated tactile sensor of 5×5 mm2 size has linear dependence of the output on both normal and shear forces. The output noise has been successfully decreased by 14 and 34% in the sensor using the TSVs compared with that using wires of 3 and 6 mm lengths, respectively.

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３方向カンチレバーを用いた多軸触覚センサの作製と基礎特性

Cited by 23 publications

References 6 publications

Electromotive Manipulator Control by Detection of Proximity, Contact, and Slipping Using MEMS Multiaxial Tactile Sensor

Electromotive Manipulator Control by Detection of Proximity, Contact, and Slipping Using MEMS Multiaxial Tactile Sensor

Texture Characterization Including Warm/Cool Sensation using Force-, Light-, and Temperature-Sensitive Microelectromechanical Systems Sensor

Fabrication and Noise Reduction of the Miniature Tactile Sensor Using Through-Silicon-Via Connection with Signal Amplifier

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