5-axis Ultra Precision Nano Machine Tool by Means of Linear Motor Drive

Kawai, Tomohiko; Ebihara, Keikichi; Yamamoto, Akira

doi:10.2493/jjspe.72.435

Cited by 4 publications

(2 citation statements)

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“…In contrast, linear motors are free from these problems and are increasingly used for precision industrial machines [1]. In particular, linear motors have become general driving units in ultra-precision positioning mechanisms for lithography systems [2][3][4] and ultra-precision machine tools [5][6][7][8][9]. In addition to positioning accuracy, an important characteristic in recent precision positioning machines has been high responsiveness, i.e., high acceleration and high velocity.…”

Section: Introductionmentioning

confidence: 99%

High-precision and high-speed positioning of 100G linear synchronous motor

Sato

2015

Precision Engineering

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Section: Introductionmentioning

confidence: 99%

High-precision and high-speed positioning of 100G linear synchronous motor

Sato

2015

Precision Engineering

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“…However, none of the above-mentioned methods can so far produce a truly seamless roller mold when a specifically defined pattern or complicated microstructure is given. Other methods which can manufacture seamless surface structures directly on a roller, such as direct machining by a diamond graver [8] or laser direct writing technology [9], also suffer some limitation and drawbacks. For example, the diamond cutter machining method is limited to simple 2D patterns only and potentially vulnerable to lone-term wearing out or breaking of the diamond cutter during the machining process.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of seamless patterns onto metal rollers by photolithography

Chen

Lee

Hsiao

2010

2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems

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This paper develops a novel method to fabricate seamless and complicated patterns of microstructures onto the cylindrical surface of a metal roller. This patterned metal roller can then serve as a roller mold in roll-to-roll (R2R) continuous roller imprinting of microstructures at low-cost, high-speed, and large-area. The first step towards fabricating a seamless roller mold is a pneumatically driven and self-spinning coating method and system which can uniformly spin-coat a smooth thin photoresist (PR) layer on the cylindrical surface of a roller. After the PR coating, a UV exposure system which consists of a UV light source, a mask, and a rotary mechanism is setup up so that the PR coating is exposed in a step-and-rotate manner. Finally the exposed PR on the surface of roller can be developed and then the metal roller can be chemically etched, similar to standard process in conventional photolithography. That completes the fabrication of seamless roller molds. A number of seamless roller molds with different patterns of microstructures have been successfully fabricated. Potential developments and possible applications are under investigation.

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Temperature Control Performance of a Built-In Motor Spindle by Developed Temperature Feedback Control System

Wakiya,

Ishida,

Kusuyama

et al. 2023

IJAT

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The temperature control performance of a developed temperature feedback control system was experimentally investigated. The control system was based on a real-time temperature control of a cooling fluid. In particular, this study focused on the temperature control performance of a built-in motor spindle that used the developed temperature fedback control system. The built-in motor used in the study had water cooling jackets. The temperature of the built-in motor spindle was measured and feedback into the developed temperature feedback control system. Temperature control accuracy of the built-in motor spindle under steady state was then assessed. Furthermore, the effects of the time-variant changes in spindle rotation and ambient temperature on the performance of the temperature control system was investigated. The results of the experiments show that the temperature control accuracy of the built-in motor spindle under steady state condition was ±0.03°C. The temperature control performance of the built-in motor spindle under changes in the rotational speed of the spindle was examined. The experimental results show that the temperature change of the spindle could be suppressed to a maximum of approximately 0.3°C under transient state during sudden change in spindle speed. In addition, the effects of the changes in ambient and cooling water temperatures, which simulated actual environmental operating conditions, on the spindle temperature were investigated. The results show that the change in the spindle temperature could be suppressed by approximately less than ±0.1°C. These experimental results indicate that the developed temperature feedback control system achieved high temperature control accuracy and high response for the built-in motor spindle. In particular, the developed control system successfully controlled the time-variant change in the generated heat, thereby improving the thermal stability of the machine tool spindle.

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5-axis Ultra Precision Nano Machine Tool by Means of Linear Motor Drive

Cited by 4 publications

References 0 publications

High-precision and high-speed positioning of 100G linear synchronous motor

High-precision and high-speed positioning of 100G linear synchronous motor

Fabrication of seamless patterns onto metal rollers by photolithography

Temperature Control Performance of a Built-In Motor Spindle by Developed Temperature Feedback Control System

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