500-600 GHz RF MEMS based tunable stub integrated in micromachined rectangular waveguide

Shah, Umer; Decrossas, Emmanuel; Jung-Kubiak, Cecile; Reck, Theodore; Chattopadhyay, Goutam; Mehdi, Imran; Oberhammer, J.

doi:10.1109/mwsym.2015.7166831

Cited by 4 publications

(5 citation statements)

References 11 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The reconfigurable waveguides and other reconfigurable circuits have also been presented recently for the terahertz band [94], [95]. The micromachined RWGs that are integrated with mMEMS cantilevers have been used for obtaining reconfigurable stubs and phase shifters.…”

Section: Reconfigurable Guided-wave Componentsmentioning

confidence: 99%

“…The micromachined RWGs that are integrated with mMEMS cantilevers have been used for obtaining reconfigurable stubs and phase shifters. Shah et al present the first example of a switchable, shunt connected stub for the micromachined RWGs [94], which is given in Fig. 15.…”

Section: Reconfigurable Guided-wave Componentsmentioning

confidence: 99%

mentioning

confidence: 99%

See 2 more Smart Citations

Miniature MEMS: Novel Key Components Toward Terahertz Reconfigurability

Demir

Ünlü

2020

J. Microelectromech. Syst.

View full text Add to dashboard Cite

We present an overview of the emerging and enabling miniature MEMS-based components for the terahertz frequencies. The usage of miniature MEMS integrated within the terahertz components is an uprising field of research, which offers reconfigurability, improved performance, and ability to perform unprecedented functions that cannot be achieved using the state-of-the-art semiconductor and optical technologies. In this paper, we discuss the recent progress and future of miniature MEMS-based reconfigurable components and present examples including reconfigurable sources, detectors, metamaterials, and guided-wave components.

show abstract

Section: Reconfigurable Guided-wave Componentsmentioning

confidence: 99%

Section: Reconfigurable Guided-wave Componentsmentioning

confidence: 99%

See 1 more Smart Citation

Miniature MEMS: Novel Key Components Toward Terahertz Reconfigurability

Demir

Ünlü

2020

J. Microelectromech. Syst.

View full text Add to dashboard Cite

show abstract

“…This paper introduces the first ever submillimeter-wave MEMS reconfigurable phase shifter operating in the frequency band between 500 to 550 GHz. In two recent conference publications, the authors have shown how a MEMS switched surface can be used to make an RF MEMS switchable stub [15] and how to use such switchable stubs for phase shifting [16]. This paper is an extension of these conference papers [15], [16], and discusses the phase shifter design, fabrication and assembly in detail, and new measurement data (both RF and electromechanical) is presented.…”

Section: Introductionmentioning

confidence: 99%

Submillimeter-Wave 3.3-bit RF MEMS Phase Shifter Integrated in Micromachined Waveguide

Shah

Decrossas

Jung-Kubiak

et al. 2016

IEEE Trans. THz Sci. Technol.

View full text Add to dashboard Cite

This paper presents a submillimeter-wave 500–550-GHz MEMS-reconfigurable phase shifter, which is based on loading a micromachined rectangular waveguide with 9 E-plane stubs. The phase shifter uses MEMS-reconfigurable surfaces to individually block/unblock the E-plane stubs from the micromachined waveguide. Each MEMS-reconfigurable surface is designed so that in the nonblocking state, it allows the electromagnetic wave to pass freely through it into the stub, while in the blocking state, it serves as the roof of the main waveguide and blocks the wave propagation into the stub. The phase-shifter design comprises three micromachined chips that are mounted in the H-plane cuts of the rectangular waveguide. Experimental results of the first device prototypes show that the microelectromechanical system (MEMS)-reconfigurable phase shifter has a linear phase shift of 20° in ten discrete steps (3.3 bits). The measured insertion loss is better than 3 dB, of which only 0.5–1.5 dB is attributed to the MEMS surfaces and switched stubs, and the measured return loss is better than 15 dB in the design frequency band of 500–550 GHz. It is also shown that the major part of the insertion loss is attributed to misalignment and assembly uncertainties of the micromachined chips and the waveguide flanges, shown by simulations and reproducibility measurements. The MEMS-reconfigurable phase shifter is also operated in an analog tuning mode for high phase resolution. Furthermore, a detailed study has been carried out identifying the reason for the discrepancy between the simulated (90°) and the measured (20°) phase shift. Comb-drive actuators with spring constant variations between 2.13 and 8.71 N/m are used in the phase shifter design. An actuation voltage of 21.94 V with a reproducibility better than σ=0.0503 V is measured for the actuator design with a spring constant of 2.13 N/m. Reliability measurement on this actuator was performed in an uncontrolled laboratory environment and showed no deterioration in the functioning of the actuator observed over one hundred million cycles.

QC 20170201

show abstract

“…Moreover, MEMS based waveguide switches have been shown to perform well up to a frequency of 110 GHz [4]. MEMS-based RF devices are rare above 110 GHz and so far only two devices: a switchable stub [5] and a phase shifter [6] have been reported by the authors functioning up to a maximum frequency of 600 GHz. In addition, micromachined waveguides have shown promising results even up to 2.7 THz [7].…”

Section: Introductionmentioning

confidence: 99%

500-750 GHz submillimeter-wave MEMS waveguide switch

Shah

Reck

Decrossas

et al. 2016

2016 IEEE MTT-S International Microwave Symposium (IMS)

Self Cite

View full text Add to dashboard Cite

-This paper presents a 500-750 GHz waveguide based single-pole single-throw (SPST) switch achieving a 40% bandwidth. It is the first ever RF MEMS switch reported to be operating above 220 GHz. The switch is based on a MEMSreconfigurable surface which can block the wave propagation in the waveguide by short-circuiting the electrical field lines of the TE10 mode. The switch is designed for optimized isolation in the blocking state and for optimized insertion loss in the nonblocking state. The measurement results of the first prototypes show better than 15 dB isolation in the blocking state and better than 3 dB insertion loss in the non-blocking state for 500-750 GHz. The higher insertion loss is mainly attributed to the insufficient metal thickness and surface roughness on the waveguide sidewalls. Two switch designs with different number of blocking elements are fabricated and compared. The overall switch bandwidth is limited by the waveguide only and not by the switch technology itself.

show abstract

500-600 GHz RF MEMS based tunable stub integrated in micromachined rectangular waveguide

Cited by 4 publications

References 11 publications

Miniature MEMS: Novel Key Components Toward Terahertz Reconfigurability

Miniature MEMS: Novel Key Components Toward Terahertz Reconfigurability

Submillimeter-Wave 3.3-bit RF MEMS Phase Shifter Integrated in Micromachined Waveguide

500-750 GHz submillimeter-wave MEMS waveguide switch

Contact Info

Product

Resources

About