2021
DOI: 10.1002/sdtp.14802
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56‐5: Image Sensor Using IGZO‐TFT Backplane with Sacrificial Barrier Layer for X‐Ray Detector

Abstract: Amorphous IGZO TFT arrays have been developed as backplanes for 17ç17 inch flat panel X‐ray detector. A sacrificial barrier layer (SBL) is introduced to protect the a‐IGZO channel from H plasma atmosphere, which can effectively solve the problem of negative threshold voltage (Vth) shift and/or even TFT continuously turn‐on.

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Cited by 4 publications
(3 citation statements)
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“…X-ray flat-panel detectors (FPDs) comprising a-Si thin-film transistors (TFTs) and a-Si pin photodiodes are highly effective sensor devices used in the field of medical imaging and nondestructive inspection. Extensive research has been conducted on the development of FPDs with oxide TFTs because they can achieve higher frame rates than a-Si TFTs [1][2][3]. However, oxide TFTs have a lower radiation hardness than a-Si TFTs [4][5][6].…”
Section: Introductionmentioning
confidence: 99%
“…X-ray flat-panel detectors (FPDs) comprising a-Si thin-film transistors (TFTs) and a-Si pin photodiodes are highly effective sensor devices used in the field of medical imaging and nondestructive inspection. Extensive research has been conducted on the development of FPDs with oxide TFTs because they can achieve higher frame rates than a-Si TFTs [1][2][3]. However, oxide TFTs have a lower radiation hardness than a-Si TFTs [4][5][6].…”
Section: Introductionmentioning
confidence: 99%
“…However, most researches about FPXD were focused on better performance scintillator, such as perovskite scintillators, or oxide TFT [3], which replace a-Si TFT. There are little studies on a-Si PIN photodiode except deposition and etching processes.…”
Section: Introductionmentioning
confidence: 99%
“…This feature lets the OS used in displays on the market [2], and integrated circuits utilizing OS such as a low power-consumption memory [3] and a central processing unit (CPU) [4] are proposed. An analog input and output (I/O) in sensors also requires a low off-state current, and in some application examples utilizing the extremely low leakage current of the OS field-effect transistor (OSFET), an image of an object moving at a high speed is captured by a global shutter method without image distortion [5], and the OSFET is used in an X-ray sensing panel in radiology [6]. A schematic diagram of the X-ray image sensor and a circuit diagram of a pixel in the sensor are shown in Figure 1 and 2, respectively.…”
Section: Introductionmentioning
confidence: 99%