59‐1: Invited Paper: From Lab to Fab: Challenges and Requirements for High‐Volume MicroLED Manufacturing Equipment

Abstract

Availability of standard, high volume production tools and processes enabled the commercialization and commoditization of LCD and OLED. For microLED, the lack of processes standards and the proliferation of technology paths hinders the development of high‐volume manufacturing tools. This paper discusses the challenges for equipment manufacturers attempting to capture the microLED opportunity. While various technology bottlenecks remain, the microLED display industry can leverage on existing expertise and equipment from the display, semiconductor, LED and photonic industries to accelerate industrialization.

50‐3: Status of MicroLED Mass‐Transfer Processes and Equipment

“…No matter how good one is at improving epitaxy, chip manufacturing and bonding yields, defective pixels will always occur. Manufacturers must therefore develop effective defect management strategies combining pixel redundancies and/or individual pixel repair, along with chip and pixel testing and binning [4] . Some makers are therefore developping turnkey solutions that feature inspection, transfer and individual or multi-die repair processes.…”

38‐4: Invited Paper: Inline Screening Known Good Die (KGD) Mapping for MicroLEDs

“…2a. The manufacturing process flows and technologies for microLEDs are similar to traditional LEDs, however, in order to achieve the performance and the cost point needed for high volume adoption in consumer markets, the industry will require a paradigm shift towards a "semiconductor manufacturing" process control mindset similar to the silicon IC industry [1], including finding yield-critical defects with inspection, and determining variations that affect performance with metrology. Process control involves a sampling methodology, where some percentage of lots, wafers, and die are measured.…”

“…MicroLEDs have many key advantages over other display technologies, including brightness, contrast, lifetime, etc. Cost, however, remains a key challenge to wide market adoption [1]. Reducing cost will be one of the key enablers of this technology.…”

11.3: Invited Paper: MicroLED End‐to‐End Process Control

“…In the epitaxy and microLED patterning processes, the manufacturing process flows and technologies for microLED are similar to traditional LEDs, however, in order to achieve the performance and the cost point needed for high volume adoption in consumer markets, the industry will require a paradigm shift towards a "semiconductor manufacturing" process control mindset [1] as shown in Fig. 3.…”