8.3.3 UV Assisted Chemical Gas Sensing of Nanoporous TiO2 at Low Temperature

Liu, Lipeng; Li, Xiaogan; Wang, Xiaoying; Yu, Jun Suh; Tang, Zhiyuan; Wang, Jing; Li, Shiwei; Liao, Jin-jun

doi:10.5162/imcs2012/8.3.3

Cited by 4 publications

(2 citation statements)

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“…The current of the device sensor will increase if any concentrations of any chemicals are evaporated onto the substrate of IDE pattern. The various metal oxides have been investigated for sensing gases to detect formaldehyde includes NiO thin film [7], SnO2 or doped SnO2 [17], CdO-mixed In2O3 [18], TiO2 [19], LaFe1−xZnxO3 [20] and doped ZnO [21]. In other words, the trend shows that higher concentration of chemicals causes more ions to flow across the IDE.…”

Section: Resultsmentioning

confidence: 99%

Characterization of Difference Size of IDE Pattern for Formaldehyde Detection Sensor

Zaki

Hashim

Arshad

et al. 2015

AMM

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This paper studies the effect of different gap sizes of IDE pattern on the surface morphology and electrical properties for the formaldehyde detection sensor. Two types of IDE chrome mask are designed to determine the ideal IDE pattern for formaldehyde gas detection by using conventional lithography. In the first method, IDE is transferred onto SiO2layer. In order to ensure that the perfect pattern with minimum defect structure is obtained, the process parameters should be optimized and controlled. In the second method, the aluminium is deposited directly on SiO2/Si substrate by using IDE hard mask design plate. The fabricated IDE pattern is further validated through morphological and electrical characterization. The average gap size of IDE sensor is approximately 100 μm and 400 μm for IDE chrome and IDE hard mask respectively. The latter method is preferable since for formaldehyde gas sensing large size is needed and moreover the process is simple and requires low cost. Characterization of difference IDE pattern is demonstrated by various measurements.

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Section: Resultsmentioning

confidence: 99%

Characterization of Difference Size of IDE Pattern for Formaldehyde Detection Sensor

Zaki

Hashim

Arshad

et al. 2015

AMM

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“…UV-activated sensing reports have been communicated by researchers in divulged applications. On investigating the photoresponse behavior, different reports claimed that electrons emitted from the substrate due to excitation from the UV light promote the absorption and desorption rate, improving the response time and recovery rate . UV light-activated SnO 2 /ZnO showed excellent response to formaldehyde, whereas the temperature-activated one showed excellent response to acetone against various other gases such as benzene, methanol, and methylbenzene .…”

Section: Introductionmentioning

confidence: 99%

Design, Fabrication, and Packaging of an Optothermally Activated Nanocrystalline Pd–ZnO-Based Selective CO Sensor on a Screen-Printed In-Plane Heater

Anjitha

Ahirwar

et al. 2022

ACS Appl. Electron. Mater.

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Continuous monitoring of gases at low concentrations is necessary for keeping track of emanations from coal mines as gas emissions prove to be a detrimental factor for people working in such environments. Therefore, there is a requirement to develop a selective CO sensor which can go down to the ppm level for initiating the triggering of an alarm system. With this objective, a selective CO (up to 20 ppm) sensor has been investigated with the exploration of different material combinations (Pd−ZnO) and optothermal activation techniques. The selectivity of target gases such as CO, CH 4 , and NH 3 has been a controversial topic among researchers as the sensing mechanism is almost similar in all the three cases. The major challenge to be addressed while designing a micro-electromechanical system-based gas sensor is the problem of reliability, cross-sensitivity, and selectivity, which stagnates the overall performance of the system. The optothermally activated sensor platform with suitable nanomaterials play a significant role in curtailing the above-mentioned issues. The present work implements Pd-doped nanocrystalline ZnO with defect-oriented active sites which are found to be highly efficacious in providing a sensor with a strong adsorption reaction and propelling the surface conversion kinetics. The sensor is optimized for selective CO sensing due to the interplay between the defect states on Pd−ZnO with optical and thermal activation. As a direct consequence, a reliable, robust, cost-effective, and CO-selective packaged gas sensor at approximately 3.5 W is realized. Simulation, optimization of the sensing nanomaterial, fabrication of a screen-printed integrated heater and sensing electrodes, thermo-optical excitation, detailed packaging, and characterization are discussed in this study. Thus, the present methodology to fabricate the CO-selective sensor is suitable for various applications where a robust, reliable, selective sensing performance is required. Detailed material characterization has been performed to analyze the sensing behavior of the grown nanomaterials (Pd−ZnO).

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Electrochemically Derived Oxide Nanoform-Based Gas Sensor Devices: Challenges and Prospects with MEMS Integration

Bhattacharyya

Dutta

Chattopadhyay

2016

Advanced Mechatronics and MEMS Devices II

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8.3.3 UV Assisted Chemical Gas Sensing of Nanoporous TiO2 at Low Temperature

Cited by 4 publications

References 0 publications

Characterization of Difference Size of IDE Pattern for Formaldehyde Detection Sensor

Characterization of Difference Size of IDE Pattern for Formaldehyde Detection Sensor

Design, Fabrication, and Packaging of an Optothermally Activated Nanocrystalline Pd–ZnO-Based Selective CO Sensor on a Screen-Printed In-Plane Heater

Electrochemically Derived Oxide Nanoform-Based Gas Sensor Devices: Challenges and Prospects with MEMS Integration

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