Characterization of Difference Size of IDE Pattern for Formaldehyde Detection Sensor

Abstract

This paper studies the effect of different gap sizes of IDE pattern on the surface morphology and electrical properties for the formaldehyde detection sensor. Two types of IDE chrome mask are designed to determine the ideal IDE pattern for formaldehyde gas detection by using conventional lithography. In the first method, IDE is transferred onto SiO2layer. In order to ensure that the perfect pattern with minimum defect structure is obtained, the process parameters should be optimized and controlled. In the second method, the aluminium is deposited directly on SiO2/Si substrate by using IDE hard mask design plate. The fabricated IDE pattern is further validated through morphological and electrical characterization. The average gap size of IDE sensor is approximately 100 μm and 400 μm for IDE chrome and IDE hard mask respectively. The latter method is preferable since for formaldehyde gas sensing large size is needed and moreover the process is simple and requires low cost. Characterization of difference IDE pattern is demonstrated by various measurements.