IEEE Photon. Technol. Lett.
 2013
DOI: 10.1109/lpt.2013.2280987
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850-nm Edge-Illuminated Si Photodiodes Fabricated With CMOS-MEMS Technology

Yi-Hsun Hsieh
1
,
Fang-Ping Chou
2
,
Ching-Wen Wang
3
et al.
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