2019 Research, Invention, and Innovation Congress (RI2C) 2019
DOI: 10.1109/ri2c48728.2019.8999896
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96-GHz Complementary Split Ring Resonator for Thin Photoresist Film Thickness Characterization

Abstract: Non-destructive thickness measurement offers a valuable feature for thin polymer-based applications in both industrial and medical utilization. Herein, we developed a novel, non-destructive, millimetre-wave WR-10 waveguide sensor for measuring a dielectric film layer on a transparent substrate. Complementary split-ring resonator (CSRR) was integrated on top of a customized WR10 waveguide and operated at 96 GHz. The thickness of the SU-8 layers, ranging from 3-13 m, coated on a glass substrate was then examined… Show more

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