High nitrogen face centred cubic phase formed on the nitrogen modified Fe-Cr-Ni austenitic stainless steel, which is named by c N phase, has a combined wear and corrosion resistance. Xray diffraction (XRD) patterns of the c N phase on the stainless steel depict a set of broad and asymmetry diffraction peaks with a peak shift to low Bragg angles and a decrease in intensity, even disappearing of some peaks of high index planes, from each austenite peak for the c matrix. The peak shift of the XRD patterns was first explained by Warren's XRD theory by Blawert et al. (Surf. Coat. Technol., 2001, 136, 181). In this paper, a systematic study of XRD on the peak shift, peak asymmetry, peak broadening and peak intensity of the c N phase has been carried out, based on a fault induced scattering geometry in diffraction to imperfect crystals by Warren's theory and Wagner's method. Both the higher deformation faults density a in a range of 0?02-0?25 and the lower twin faults density b of 0?01-0?1 were successfully used to describe the line profiles in the XRD patterns of the c N phase formed on plasma source ion nitrided 1Cr18Ni9Ti (18-8 type) austenitic stainless steel. A novel stacking faults factor S ab dependent on a and b described, in good agreement, the peak intensity of the c N phase. The calculated XRD patterns of the c N phase using the imperfect crystals model of a face centred cubic phase with a higher deformation faults density and a lower twin faults density were associated with the experimentally structural characteristics.