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Murphy, Anthony B.

doi:10.1023/a:1007099926249

Cited by 190 publications

(81 citation statements)

References 33 publications

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“…15, T Ϸ 0.3− 0.4 kg km −1 s −1 . Comparing these values to those from literature, 20 we find that this is compatible with a heavy particle temperature of T h Ϸ 0.6-1.0 eV.…”

Section: Analysis and Interpretationsupporting

confidence: 83%

Optimization of the output and efficiency of a high power cascaded arc hydrogen plasma source

et al. 2008

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The operation of a cascaded arc hydrogen plasma source was experimentally investigated to provide an empirical basis for the scaling of this source to higher plasma fluxes and efficiencies. The flux and efficiency were determined as a function of the input power, discharge channel diameter, and hydrogen gas flow rate. Measurements of the pressure in the arc channel show that the flow is well described by Poiseuille flow and that the effective heavy particle temperature is approximately 0.8 eV. Interpretation of the measured I -V data in terms of a one-parameter model shows that the plasma production is proportional to the input power, to the square root of the hydrogen flow rate, and is independent of the channel diameter. The observed scaling shows that the dominant power loss mechanism inside the arc channel is one that scales with the effective volume of the plasma in the discharge channel. Measurements on the plasma output with Thomson scattering confirm the linear dependence of the plasma production on the input power. Extrapolation of these results shows that ͑without a magnetic field͒ an improvement in the plasma production by a factor of 10 over where it was in van Rooij et al. ͓Appl. Phys. Lett. 90, 121501 ͑2007͔͒ should be possible.

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“…15, T Ϸ 0.3− 0.4 kg km −1 s −1 . Comparing these values to those from literature, 20 we find that this is compatible with a heavy particle temperature of T h Ϸ 0.6-1.0 eV.…”

Section: Analysis and Interpretationsupporting

confidence: 83%

Optimization of the output and efficiency of a high power cascaded arc hydrogen plasma source

et al. 2008

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“…Generally, the decrease of the temperature indicates the decline of the torch power. Besides, the reduction of temperature also results in significant reduction of the electrical conductivity when temperature is below 20,000 K as stated in [30]. For example, at the condition of I = 400 A, when R increases from 0.0016 m to 0.0018 m (growing by 26.5% for R 2 ), the calculated average value of σ falls by 27%.…”

Section: Effect Of Predefined Model Parameters On the Simulation Resultsmentioning

confidence: 82%

Three-dimensional simulation of an argon–hydrogen DC non-transferred arc plasma torch

Guo

Yin

Liao

et al. 2015

International Journal of Heat and Mass Transfer

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“…[11]. The momentum transfer collision integrals ð " Q ð1;1Þ ij Þ and the viscosity collision integrals ð " Q ð2;2Þ ij Þ used in this work are the same as those compiled by Murphy and used in the calculation of the transport coefficients of Ar-H 2 plasmas [23,24].…”

Section: Transport Propertiesmentioning

confidence: 99%

Numerical Modeling of an Ar–H2 Radio-Frequency Plasma Reactor under Thermal and Chemical Nonequilibrium Conditions

Murphy

Ishigaki

2007

Plasma Chem Plasma Process

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The species densities and the thermal and chemical nonequilibrium phenomena in an Ar-H 2 radio frequency inductively coupled plasma reactor used for hydrogenation of materials have been investigated through numerical simulation. The mathematical model consists of a two-temperature fluid dynamics model and a chemical kinetics model that takes into account the effect of local chemical nonequilibrium. Computations are carried out for the rf plasma running at 11.7 kW and 27 kPa for different Ar-H 2 mixtures and for pure argon. Predicted results for the electron and heavy-species temperatures, the species densities, as well as the degree of thermal and chemical nonequilibrium, are presented in detail. It is found that the electron and hydrogen atom densities in the reactor and in the near-wall region of the torch are strongly altered by nonequilibrium effects. The hydrogen atom density remains high in the reactor zone, and peaks in a region that has been found to be attractive for material processing. Deviations from thermal and chemical equilibrium are greatly reduced by the addition of hydrogen to an argon plasma.

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Cited by 190 publications

References 33 publications

Optimization of the output and efficiency of a high power cascaded arc hydrogen plasma source

Optimization of the output and efficiency of a high power cascaded arc hydrogen plasma source

Three-dimensional simulation of an argon–hydrogen DC non-transferred arc plasma torch

Numerical Modeling of an Ar–H2 Radio-Frequency Plasma Reactor under Thermal and Chemical Nonequilibrium Conditions

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