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Structural and optical properties of low-temperature ZnO films grown by atomic layer deposition with diethylzinc and water precursors

“…All the above-mentioned applications require suitable and reproducible properties of this material like surface roughness, optical properties and suitable crystallographic orientation. For example, for piezoelectric devices orientation with c-axis perpendicular to the surface is required [8], while for transparent conductive oxide application c-axis parallel to the surface is desired [9]. One of the most attractive applications for ZnO would be in hybrid organic/ inorganic devices.…”