A 1-D Photonic Band Gap Tunable Optical Filter in (110) Silicon

Lipson, Ariel; Yeatman, Eric M.

doi:10.1109/jmems.2007.892894

Cited by 59 publications

(33 citation statements)

References 18 publications

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“…We would also like to mention Ref. [27], where a shift of the resonance peak of (λ/λ) = 0.5% was reported, due to a variation in the geometrical thickness of the FP air cavity driven by an electric field applied to the second movable mirror. Therefore, the FP resonator demonstrated in our work, fabricated by microstructuring of Si, is significantly better than comparable devices, given that the resonant peak shift varied from 5% to 10%.…”

Section: Results Analysismentioning

confidence: 93%

Electrically Tunable Fabry-Perot Resonator Based on Microstructured Si Containing Liquid Crystal

Tolmachev¹,

Melnikov²,

Baldycheva³

et al. 2012

PIER

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Abstract-We have built Fabry-Pérot resonators based on microstructured silicon and a liquid crystal. The devices exhibit tuning of the resonance peaks over a wide range, with relative spectral shifts of up to ∆λ/λ = 10%. In order to achieve this substantial spectral shift, cavity peaks of high order were used. Under applied voltages of up to 15 V, a variation in the refractive index of the nematic liquid crystal E7 from ∆n LC = 0.12 to ∆n LC = 0.17 was observed. These results may have practical applications in the near-, mid and far-infrared range.

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Section: Results Analysismentioning

confidence: 93%

Electrically Tunable Fabry-Perot Resonator Based on Microstructured Si Containing Liquid Crystal

Tolmachev¹,

Melnikov²,

Baldycheva³

et al. 2012

PIER

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“…Two of the six {111} planes emerge at <110> direction, and are oriented at an angle of 35.3˚ to the {110} wafer surface, while the other four {111} planes appear at <112> directions and are vertical to the {110} surface. The appearance of vertical planes along <112> direction makes {110} silicon wafer an appropriate choice for the formation of deep trenches/ grooves with vertical sidewalls [4][5][6][7][8][9][10]. In both these types of wafers, prolonged etched patterns are generally bounded by {111} planes due to their slowest etch rate nature in all kinds of anisotropic etchants.…”

Section: Introductionmentioning

confidence: 99%

A New Model for the Etching Characteristics of Corners Formed by Si<sub>{111}</sub> Planes on Si<sub>{110}</sub> Wafer Surface

Pal¹,

Singh²

2013

ENG

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The etching characteristics of concave and convex corners formed in a microstructure by the intersection of {111} planes in wet anisotropic etchant are exactly opposite to each other. The convex corners are severely attacked by anisotropic etchant, while the concave corners remain unaffected. In this paper, we present a new model which explains the root cause of the initiation and advancement of undercutting phenomenon at convex corners and its absence at concave corners on {110} silicon wafers. This contrary etching characteristics of convex and concave corners is explained by utilizing the role of dangling bond in etching process and the etching behavior of the tangent plane at the convex corner. The silicon atoms at the convex edge/ridge belong to a high etch rate tangent plane as compared to {111} sidewalls, which leads to the initiation of undercutting at the convex corner. On the other hand, all the bonds of silicon atoms pertaining to concave edges/ridge are engaged with neighboring atoms and consequently contain no dangling bond, thus resulting in no-undercutting at concave edges/corners.

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“…Despite the potential of high aspect-ratio 1D/2D PhC structures for optofluidic/biosensing applications, only a few cases have been reported in the literature so far (Gruning and Lehmann 1996;Chelnokov et al 2002;Tolmachev et al 2002;Saadany et al 2006;Barillaro et al 2006;Lipson and Yeatman 2007;Mandal et al 2009), mainly because of their more challenging fabrication with respect to planar 1D/2D PhCs. Moreover, an even lower number of papers have been published to date concerning optofluidic application of high aspect-ratio, vertical 1D PhCs (Nunes et al 2008;Barillaro et al 2009a).…”

Section: Introductionmentioning

confidence: 99%

Integrated optofluidic microsystem based on vertical high-order one-dimensional silicon photonic crystals

Barillaro

Merlo

Surdo

et al. 2011

Microfluid Nanofluid

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In this work, fabrication and testing of an optofluidic microsystem exploiting high aspect-ratio, vertical, silicon/air one-dimensional (1D) photonic crystals (PhC) are reported. The microsystem is composed of an electrochemically micromachined silicon substrate integrating a 1D PhC featuring high-order bandgaps in the near-infrared region, bonded to a glass cover provided with inlet/outlet holes for liquid injection/extraction in/out the PhC-itself. Wavelength shifts of the reflectivity spectrum of the photonic crystal, in the range 1.0-1.7 lm, induced by flow of different liquids through the PhC air gaps are successfully measured using an in-plane all-fibre setup, thanks to the PhC high aspect-ratio value. Experimental results well agree with theoretical predictions and highlight the good linearity and high sensitivity of such an optofluidic microsystem in measuring refractive index changes. The sensitivity value is estimated to be 1,049 nm/RIU around 1.55 lm, which is among the highest reported in the literature for integrated refractive index sensors, and explained in terms of enhanced interaction between light and liquid within the PhC.

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A 1-D Photonic Band Gap Tunable Optical Filter in (110) Silicon

Cited by 59 publications

References 18 publications

Electrically Tunable Fabry-Perot Resonator Based on Microstructured Si Containing Liquid Crystal

Electrically Tunable Fabry-Perot Resonator Based on Microstructured Si Containing Liquid Crystal

A New Model for the Etching Characteristics of Corners Formed by Si<sub>{111}</sub> Planes on Si<sub>{110}</sub> Wafer Surface

Integrated optofluidic microsystem based on vertical high-order one-dimensional silicon photonic crystals

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A 1-D Photonic Band Gap Tunable Optical Filter in (110) Silicon

Cited by 59 publications

References 18 publications

Electrically Tunable Fabry-Perot Resonator Based on Microstructured Si Containing Liquid Crystal

Electrically Tunable Fabry-Perot Resonator Based on Microstructured Si Containing Liquid Crystal

A New Model for the Etching Characteristics of Corners Formed by Si&lt;sub&gt;{111}&lt;/sub&gt; Planes on Si&lt;sub&gt;{110}&lt;/sub&gt; Wafer Surface

Integrated optofluidic microsystem based on vertical high-order one-dimensional silicon photonic crystals

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A New Model for the Etching Characteristics of Corners Formed by Si<sub>{111}</sub> Planes on Si<sub>{110}</sub> Wafer Surface