A 1-MHz 2-D CMUT array for HIFU thermal ablation

Yoon, Hyo-Seon; Vaithilingam, Srikant; Park, Kwan Kyu; Nikoozadeh, Amin; Firouzi, Kamyar; Choe, Jung Woo; Watkins, Ronald D.; Oguz, H. Kagan; Kupnik, Mario; Pauly, Kim Butts; Khuri-Yakub, Pierre

doi:10.1063/1.4977622

Cited by 6 publications

(1 citation statement)

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“…The motivation to further develop CMUT for other application resulted from an immersion test where it has shown that CMUTs can provide a larger bandwidth over traditional piezoelectric transducers [25]. Since then CMUTs have been used in a variety of domains ranging from high-intensity focused ultrasound [26,27], ultrasound imaging [28,29,30,31,32,33], sensing application [34,35] to non-destructive testing [36]. Some of these applications and CMUT designs have been further adapted to advance CMUTs for PAI applications.…”

Section: Introductionmentioning

confidence: 99%

Photoacoustic Imaging with Capacitive Micromachined Ultrasound Transducers: Principles and Developments

Chan

Zheng

Bell

et al. 2019

Sensors

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Photoacoustic imaging (PAI) is an emerging imaging technique that bridges the gap between pure optical and acoustic techniques to provide images with optical contrast at the acoustic penetration depth. The two key components that have allowed PAI to attain high-resolution images at deeper penetration depths are the photoacoustic signal generator, which is typically implemented as a pulsed laser and the detector to receive the generated acoustic signals. Many types of acoustic sensors have been explored as a detector for the PAI including Fabry–Perot interferometers (FPIs), micro ring resonators (MRRs), piezoelectric transducers, and capacitive micromachined ultrasound transducers (CMUTs). The fabrication technique of CMUTs has given it an edge over the other detectors. First, CMUTs can be easily fabricated into given shapes and sizes to fit the design specifications. Moreover, they can be made into an array to increase the imaging speed and reduce motion artifacts. With a fabrication technique that is similar to complementary metal-oxide-semiconductor (CMOS), CMUTs can be integrated with electronics to reduce the parasitic capacitance and improve the signal to noise ratio. The numerous benefits of CMUTs have enticed researchers to develop it for various PAI purposes such as photoacoustic computed tomography (PACT) and photoacoustic endoscopy applications. For PACT applications, the main areas of research are in designing two-dimensional array, transparent, and multi-frequency CMUTs. Moving from the table top approach to endoscopes, some of the different configurations that are being investigated are phased and ring arrays. In this paper, an overview of the development of CMUTs for PAI is presented.

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