A 100 kHz vibratory MEMS rate gyroscope with experimental verification of system model's frequency scaling

Liewald, Jan-Timo; Kuhlmann, Burkhard; Balslink, Thorsten; Manoli, Yiannos

doi:10.1109/memsys.2012.6170245

Cited by 5 publications

(3 citation statements)

References 9 publications

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“…The critical value b r when the minimum Q T ED occurs is different for each diameter. not suitable for practical MEMS rate sensor applications because higher frequency applications are preferred to avoid unwanted couplings and typically the frequency range is 10 to 30 (kHz) [32], based on published values. For this reason a trade-off is required between Q T ED and frequency when selecting the basic ring dimensions to achieve high Q.…”

Section: Parameter Study Of Unsupported Ringsmentioning

confidence: 99%

An investigation on thermoelastic damping of high-Q ring resonators

Hossain

McWilliam

Popov

2016

International Journal of Mechanical Sciences

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For applications requiring high performance angular rate measurements it is important to be able to design MEMS rate sensors with high quality factors (Q). This paper considers ring resonator based rate sensors and investigates the influence of design changes to the ring and support legs on thermoelastic damping, which is the dominant dissipation mechanism. A computational method is used to quantify the thermoelastic damping and a detailed parameter study is conducted to understand the influence of ring geometry, support legs and micro-machined slots around the ring circumference. The results show that damping in the support legs can have significant influence on the total energy dissipated from the resonator, and the optimum leg geometry can be identified to achieve high Q. It is also observed that the addition of slots improves Q for resonators having higher energy loss. However, for high-Q, rings slots have a detrimental effect. The results presented are useful for designing ring resonators with reduced levels of damping.

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Section: Parameter Study Of Unsupported Ringsmentioning

confidence: 99%

An investigation on thermoelastic damping of high-Q ring resonators

Hossain

McWilliam

Popov

2016

International Journal of Mechanical Sciences

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“…In [12], an alternative constant-frequency oscillation control method is introduced, which designs electrostatically tunable structure along the drive axis and tunes the drive resonant frequency to a preselected frequency. However, the frequency of the sensing output through the interface circuit is still dependent on the mechanical natural frequency, which covers a wide range from 1 kHz to 100 kHz [13]. This constitutes a need of adjusting the detection electronic for micro-gyroscopes with various operating frequencies, e.g.…”

Section: Introductionmentioning

confidence: 99%

A novel oscillation control for MEMS vibratory gyroscopes using a modified electromechanical amplitude modulation technique

Lin

Liu

et al. 2016

J. Micromech. Microeng.

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This paper reports a novel oscillation control algorithm for MEMS vibratory gyroscopes using a modified electromechanical amplitude modulation (MEAM) technique, which enhances the robustness against the frequency variation of the driving mode, compared to the conventional EAM (CEAM) scheme. In this approach, the carrier voltage exerted on the proof mass is frequency-modulated by the drive resonant frequency. Accordingly, the pick-up signal from the interface circuit involves a constant-frequency component that contains the amplitude and phase information of the vibration displacement. In other words, this informational detection signal is independent of the mechanical resonant frequency, which varies due to different batches, imprecise micro-fabrication and changing environmental temperature. In this paper, the automatic gain control loop together with the phase-locked loop are simultaneously analyzed using the averaging method and Routh–Hurwitz criterion, deriving the stability condition and the parameter optimization rules of the transient response. Then, a simulation model based on the real system is set up to evaluate the control algorithm. Further, the proposed MEAM method is tested using a field-programmable-gate-array based digital platform on a capacitive vibratory gyroscope. By optimizing the control parameters, the transient response of the drive amplitude reveals a settling time of 45.2 ms without overshoot, according well with the theoretical prediction and simulation results. The first measurement results show that the amplitude variance of the drive displacement is 12 ppm in an hour while the phase standard deviation is as low as 0.0004°. The mode-split gyroscope operating under atmospheric pressure demonstrates an outstanding performance. By virtue of the proposed MEAM method, the bias instability and angle random walk are measured to be 0.9° h−1 (improved by 2.4 times compared to the CEAM method) and 0.068° (√h)−1 (improved by 1.4 times), respectively.

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“…They are increasingly used in applications ranging from consumer electronics to aerospace and are now one of the most common MEMS products. Typical applications of MEMS gyroscopes in the consumer market include image stabilization in digital cameras and camcorders, remote controllers in virtual gaming devices and motion sensing in next-generation mobile phones and tablets [2][3][4].…”

Section: Introductionmentioning

confidence: 99%

A low-noise SC-type interface asic for a closed-loop MEMS gyroscope

Liu

Tao

et al. 2014

2014 12th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT)

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This paper presents a low-noise SC-type interface ASIC for a closed-loop MEMS vibratory gyroscope. An AC sensing method is employed to convert the amplitude modulated capacitive signal to voltage signal. The interface CSA (charge sensitive amplifier) is followed by a CDS (correlated double sampling) circuit to reduce low frequency noise and eliminate offset. The system realizes a closed-loop control in the driving and sensing mode. The ASIC is fabricated in O.18um CMOS process and occupies 2.9x 1.7 mm 2 •

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A 100 kHz vibratory MEMS rate gyroscope with experimental verification of system model's frequency scaling

Cited by 5 publications

References 9 publications

An investigation on thermoelastic damping of high-Q ring resonators

An investigation on thermoelastic damping of high-Q ring resonators

A novel oscillation control for MEMS vibratory gyroscopes using a modified electromechanical amplitude modulation technique

A low-noise SC-type interface asic for a closed-loop MEMS gyroscope

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