A 1024-element bulk-micromachined thermopile infrared imaging array

Oliver, Andrew; Wise, K.D.

doi:10.1016/s0924-4247(98)00276-3

Cited by 70 publications

(28 citation statements)

References 19 publications

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“…For instance, Oliver and Wise [13], report the integration of a 1024 element array. Thermopile arrays with higher number of elements have been previously reported but usual applications of these kind of devices is thermal imaging.…”

Section: Thermopile Arraymentioning

confidence: 99%

Exploration of the metrological performance of a gas detector based on an array of unspecific infrared filters

Rubio

Santander

Fonollosa

et al. 2006

Sensors and Actuators B: Chemical

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Section: Thermopile Arraymentioning

confidence: 99%

Exploration of the metrological performance of a gas detector based on an array of unspecific infrared filters

Rubio

Santander

Fonollosa

et al. 2006

Sensors and Actuators B: Chemical

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“…Currently, there are many techniques available to produce closely spaced, thermally isolated heater elements (e.g., [17]- [20]), however the membranes can be structurally unstable, usually incapable of containing complex geometric heater patterns, provide limited thermal isolation, and contain sharp topographical features. The following method was conceptualized in order to sidestep these potential shortcomings.…”

Section: B Column-release Methodsmentioning

confidence: 99%

“…6]. The model showed that unattached cells resting more than 200 from the membrane could be moved toward the heater at a rate of approximately 2-15 using temperatures ranging from [15][16][17][18][19][20][21][22][23][24][25][26][27][28][29][30] above ambient. This result was confirmed experimentally using time-lapse videos of cell movement (see Section IV).…”

Section: Finite Element Modelingmentioning

confidence: 99%

Microheated substrates for patterning cells and controlling development

Shu

Everett

Zhang

et al. 2005

J. Microelectromech. Syst.

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Abstract-Here, we seek to control cellular development by devising a means through which cells can be subjected to a microheated environment in standard culture conditions. Numerous techniques have been devised for controlling cellular function and development via manipulation of surface environmental cues at the micro-and nanoscale. It is well understood that temperature plays a significant role in the rate of cellular activities, migratory behavior (thermotaxis), and in some cases, protein expression. Yet, the effects and possible utilization of micrometer-scale temperature fields in cell cultures have not been explored. Toward this end, two types of thermally isolated microheated substrates were designed and fabricated, one with standard backside etching beneath a dielectric film and another with a combination of surface and bulk micromachining and backside etching. The substrates were characterized with infrared microscopy, finite element modeling, scanning electron microscopy, stylus profilometry, and electrothermal calibrations. Neuron culture studies were conducted on these substrates to 1) examine the feasibility of using a microheated environment to achieve patterned cell growth and 2) selectively accelerate neural development on regions less than 100 m wide. Results show that attached neurons, grown on microheated regions set at 37 C, extended processes substantially faster than those incubated at 25 C on the same substrate. Further, unattached neurons were positioned precisely along the length of the heater filament (operating at 45 C) using free convection currents. These preliminary findings indicate that microheated substrates may be used to direct cellular development spatially in a practical manner.[1414]

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“…In the past few years, thermal image is considered about fabrication process and device in the system on a chip [1][2][3]. Single point thermal infrared detectors based on silicon thermopiles have been fabricated using silicon micromachining [4].…”

Section: Introductionmentioning

confidence: 99%

An offset reduction infrared tracking system with winner-take-all implementation for CMOS thermal microsensor

Wang

Shen

2009

2009 IEEE Sensors

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A new modified infrared tracking sensor array is proposed, which identifies the locations and sizes of thermal object efficiently with the winner-take-all (WTA) circuit and a low offset correlated double sampling (CDS) circuit. The winnertake-all (WTA) circuit is used in combination with active readout circuit for thermopile array. The offset reduction with CDS technique enhances the sensitivity of winner-take-all (WTA) circuit and shows a sharp selectivity which makes it possible to pick up only one winner pixel from each thermal object. In order to simulate and present the infrared thermal sensor array in this paper, the sensor array is integrated by using a 2P4M 0.35μm standard CMOS technology. This proposed architecture shows a high resolution with two orders higher than the circuits without CDS. The results have shown that integrated thermopile array with WTA and CDS can approach a high level of development, reliability and easy for high accuracy infrared tracking applications.

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A 1024-element bulk-micromachined thermopile infrared imaging array

Cited by 70 publications

References 19 publications

Exploration of the metrological performance of a gas detector based on an array of unspecific infrared filters

Exploration of the metrological performance of a gas detector based on an array of unspecific infrared filters

Microheated substrates for patterning cells and controlling development

An offset reduction infrared tracking system with winner-take-all implementation for CMOS thermal microsensor

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