A 128 × 128 CMOS bio-sensor array for extracellular recording of neural activity

Eversmann, B.; Jenkner, M.; Paulus, Christian; Hofmann, Franz; Brederlow, R.; Holzapfl, B.; Fromherz, Peter; Brenner, Markus; Schreiter, Matthias; Gabl, R.; Plehnert, K.; Steinhauser, M.; Eckstein, G.; Schmitt‐Landsiedel, D.; Thewes, R.

doi:10.1109/isscc.2003.1234276

Cited by 73 publications

(25 citation statements)

References 12 publications

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“…Single-chip solutions with fully-integrated CMOS multiplexing and buffering circuitry have been presented, with on-chip (Bai and Wise, 2001) and off-chip (DeBusschere and ) signal amplification. More recently systems have emerged, such as a FET-based, 16,384 microelectrode CMOS biosensor array comprising on-chip amplification circuitry with readout multiplexers and buffers (Eversmann et al, 2003), or, similarly, an MEA with on-chip amplification, filtering and addressability (Berdondini et al, 2002). While these designs represent significant improvements in neurochip development and the use of multiplexers translates into almost unconstricted array sizes, they do not yet include flexible on-chip stimulation capabilities.…”

Section: Introductionmentioning

confidence: 99%

CMOS microelectrode array for the monitoring of electrogenic cells

Heer

Franks

Blau

et al. 2004

Biosensors and Bioelectronics

164

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Signal degradation and an array size dictated by the number of available interconnects are the two main limitations inherent to standalone microelectrode arrays (MEAs). A new biochip consisting of an array of microelectrodes with fully-integrated analog and digital circuitry realized in an industrial CMOS process addresses these issues. The device is capable of on-chip signal filtering for improved signal-to-noise ratio (SNR), on-chip analog and digital conversion, and multiplexing, thereby facilitating simultaneous stimulation and recording of electrogenic cell activity. The designed electrode pitch of 250 m significantly limits the space available for circuitry: a repeated unit of circuitry associated with each electrode comprises a stimulation buffer and a bandpass filter for readout. The bandpass filter has corner frequencies of 100 Hz and 50 kHz, and a gain of 1000. Stimulation voltages are generated from an 8-bit digital signal and converted to an analog signal at a frequency of 120 kHz. Functionality of the read-out circuitry is demonstrated by the measurement of cardiomyocyte activity. The microelectrode is realized in a shifted design for flexibility and biocompatibility. Several microelectrode materials (platinum, platinum black and titanium nitride) have been electrically characterized. An equivalent circuit model, where each parameter represents a macroscopic physical quantity contributing to the interface impedance, has been successfully fitted to experimental results.

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Section: Introductionmentioning

confidence: 99%

CMOS microelectrode array for the monitoring of electrogenic cells

Heer

Franks

Blau

et al. 2004

Biosensors and Bioelectronics

164

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“…That interpretation is tested when the neuronal excitation is not probed with a single transistor, but with a closely packed array of sensor sites that are derived from the EOSFET principle. Such an array is fabricated by using an extended CMOS technology [15]. Fig.…”

Section: Eos Fet Recordingmentioning

confidence: 99%

Joining microelectronics and microionics: Nerve cells and brain tissue on semiconductor chips

Fromherz

2008

Solid-State Electronics

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“…The metallization layers in between the sensor electrode layer and the polysilicon layer can then be used to provide the necessary x-y-interconnections. In Figure 2 The 'neuro-chip' suggested by researchers from Infineon and from the MaxPlanck Institute in Martinsried (Germany) [41,42] uses the above described transducer principle and provides 128 × 128 pixels within a sensor area of 1 mm × 1 mm, which translates into a sensor pitch of 7.8 lm × 7.8 lm (Figure 2.2.17). Considering the typical dimensions of cells, this value coincides with the pitch required to monitor every cell within any (randomly achieved) spatial distribution of cells on the surface of the sensor.…”

Section: Microelectronic Chips For Neural Cell Recordingmentioning

confidence: 99%

Microelectronic Chips for Molecular and Cell Biology

et al. 2003

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The development of microfabricated devices manufactured in silicon, glass, or plastic materials is a well-known trend in the research of novel biological techniques and tools over the last two decades, resulting in a multitude of start-up companies serving the pharmaceutical, biotechnology, and diagnostics markets. However, the idea of implementing such devices on microelectronic substrates has been introduced only recently. This chapter aims to describe the state-of-the-art of microsystems for molecular and cell biology produced in general purpose CMOS (complementary metal oxide semiconductor) technology, emphasizing the advantages of this approach along with their challenges and limitations. This chapter discusses significant examples of fully tested devices in comparison with existing state-of-the-art techniques.

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A 128 × 128 CMOS bio-sensor array for extracellular recording of neural activity

Cited by 73 publications

References 12 publications

CMOS microelectrode array for the monitoring of electrogenic cells

CMOS microelectrode array for the monitoring of electrogenic cells

Joining microelectronics and microionics: Nerve cells and brain tissue on semiconductor chips

Microelectronic Chips for Molecular and Cell Biology

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