To advance our understanding of the functioning of neuronal ensembles, systems are needed to enable simultaneous recording from a large number of individual neurons at high spatiotemporal resolution and good signal-to-noise ratio. Moreover, stimulation capability is highly desirable for investigating, for example, plasticity and learning processes. Here, we present a microelectrode array (MEA) system on a single CMOS die for in vitro recording and stimulation. The system incorporates 26,400 platinum electrodes, fabricated by in-house post-processing, over a large sensing area (3.85 × 2.10 mm 2 ) with sub-cellular spatial resolution (pitch of 17.5 μm). Owing to an area and power efficient implementation, we were able to integrate 1024 readout channels on chip to record extracellular signals from a user-specified selection of electrodes. These channels feature noise values of 2.4 μV rms in the action-potential band (300 Hz-10 kHz) and 5.4 μV rms in the local-field-potential band (1 Hz-300 Hz), and provide programmable gain (up to 78 dB) to accommodate various biological preparations. Amplified and filtered signals are digitized by 10 bit parallel single-slope ADCs at 20 kSamples/s. The system also includes 32 stimulation units, which can elicit neural spikes through either current or voltage pulses. The chip consumes only 75 mW in total, which obviates the need of active cooling even for sensitive cell cultures.
I IntroductionEXTRACELLULAR RECORDINGS of the electrical activity of neural and cardiac cell networks in organs such as the brain, the retina, or the heart, can provide a wealth of information about the physiology as well as the pathological degenerations that may cause diseases, such as Parkinson's or Alzheimer's. Microelectrode arrays (MEAs) have been used for a long time for in vitro extracellular recordings of electrogenic cell cultures and tissues, such as acute or organotypic brain slices and retinae [1]- [3]. They provide simultaneous multisite recording capability, which is essential to study cellular interconnections and network properties that arise from synchronized cellular activity [4], [5]. However, passive MEAs, which typically include metal electrodes on a glass substrate, are limited in both the number of electrodes (usually less than 300) and the spatial resolution (typically ≥ 30 μm),features that are needed to reconstruct large neural networks at cellular detail.With CMOS technology, these limitations can be overcome by using multiplexing techniques, which enable access to a large number of closely-spaced electrodes to obtain large sensing areas at high spatial resolution [6]. Moreover, the monolithic integration of recording amplifiers and ADCs, on the same substrate with the electrodes, avoids off-chip parasitics and interference and, at the same time, allows for realizing a large number of recording channels with a low number of connections. In this paper, we present a recently developed CMOS MEA system that further exploits the switch-matrix approach. The system preserves s...