A 145MHz low phase-noise capacitive silicon micromechanical oscillator

Lavasani, Hossein Miri; Samarao, Ashwin K.; Casinovi, G.; Ayazi, Farrokh

doi:10.1109/iedm.2008.4796784

Cited by 24 publications

(13 citation statements)

References 5 publications

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“…It can be observed that the induced nonlinearity in the test MEMS resonators produces a maximum performance improvement of 20 dB and 15 dB at an offset frequency of about 200 Hz for the IPS and LE modes, respectively. Note that the nonlinear IPS 23 MHz oscillator, with an absolute figure of at 1 kHz offset frequency, is comparable to architectures with highcapacitive resonators [40]. In addition, when compared with state-of-the-art piezoelectric devices at higher frequencies [41], the IPS mode oscillator can also satisfy the GSM standard (after frequency up-conversion) using a resonator with a of only 4000.…”

Section: F Application Of the Nonlinear Phase-noise Modelmentioning

confidence: 94%

An Empirical Phase-Noise Model for MEMS Oscillators Operating in Nonlinear Regime

Pardo

Sorenson

Ayazi

2012

IEEE Trans. Circuits Syst. I

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Nonlinearity of a silicon resonator can lead to improved phase-noise performance in an oscillator when the phase shift of the sustaining amplifier forces the operating point to a steeper phase-frequency slope. As a result, phase modulation on the oscillator frequency is minimized because the resonator behaves as a high-order phase filter. The effect of the increased filtering translates into phase-noise shaping that reflects superior overall performance. Nonlinear effects in MEMS oscillators can be induced via sufficient driving power, generating low-frequency nonwhite noise processes that need to be considered in a phase-noise description. Since the phase-frequency response is not symmetric for a nonlinear detuned resonator, an empirical model based on power series is proposed to describe its effect in the noise sources and to account for the observed higher effective quality factor of the oscillator, the reduction in the corner frequency, and elevated levels of flicker noise very close-to-carrier. The applicability of the presented phase-noise model is shown for three piezoelectric MEMS oscillators, producing a relative fitting error below 1% in all cases.

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Section: F Application Of the Nonlinear Phase-noise Modelmentioning

confidence: 94%

An Empirical Phase-Noise Model for MEMS Oscillators Operating in Nonlinear Regime

Pardo

Sorenson

Ayazi

2012

IEEE Trans. Circuits Syst. I

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“…Motional resistance of a quadratic Si plate resonator oscillating in the contour mode (f 0 =1.31 MHz, Q=130000) is 4.47 k [23]. The resistance of a Si bulkmode resonator in the form of a disk (2.1 k, f 0 =24 MHz, Q=53000) [58] is of the same order of magnitude, as well as that of the 145 MHz resonator (2.4 k) [59]. Si bulk-mode resonators presented in [60] (f 0 =13 MHz, Q=10 5 ) and [61] (f 0 =60 MHz, Q=6200) have relatively small values of R m , amounting to 500  and 966 , respectively.…”

Section: Rf Mems Resonators -A Short Overview Of Existing Components mentioning

confidence: 94%

RF MEMS/NEMS resonators for wireless communication systems and adsorption-desorption phase noise

Jokić¹,

Frantlović²,

Đurić

et al. 2015

FACTA U EE

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During the past two decades a considerable effort has been made to develop radio-frequency (RF) resonators which are fabricated using the micro/nanoelectro-mechanical systems (MEMS/NEMS) technologies, in order to replace conventional large off-chip components in wireless transceivers and other high-speed electronic systems. The first part of the paper presents an overview of RF MEMS and NEMS resonators, including those based on two-dimensional crystals (e.g. graphene). The frequency tuning in MEMS/NEMS resonators is then analyzed. Improvements that would be necessary in order for MEMS/NEMS resonators to meet the requirements of wireless systems are also discussed. The analysis of noise of RF MEMS/NEMS resonators and oscillators is especially important in modern wireless communication systems due to increasingly stringent requirements regarding the acceptable noise level in every next generation. The second part of the paper presents the analysis of adsorption-desorption (AD) noise in RF MEMS/NEMS resonators, which becomes pronounced with the decrease of components' dimensions, and is not sufficiently elaborated in the existing literature about such components. Finally, a theoretical model of phase noise in RF MEMS/NEMS oscillators will be presented, with a special emphasize on the influence of the resonator AD noise on the oscillator phase noise. [Projekat Ministarstva nauke Republike Srbije, br. TR 32008]

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“…High-frequency and high-Q width-extensional mode SiBARs fabricated using the HARPSS process have shown atmospheric Q factors in excess of 10'000 at or above 100 MHz, with moderate motional resistances (Q-1000 Q) [1,2]. The resonance frequency of silicon micromechanical resonators is dependent on the physical dimensions of the resonating structure.…”

Section: Introductionmentioning

confidence: 98%

Post-Fabrication Electrical Trimming of Silicon Bulk Acoustic Resonators using Joule Heating

Samarao

Ayazi

2009

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems

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This paper presents a new method to electrically trim the resonance frequency of a Silicon Bulk Acoustic Resonator (SiBAR) post fabrication. Width-extensional mode silicon resonators are heated by passing a current through their resonating elements. This causes a mass loading gold pattern to diffuse into the bulk of the resonator. Upon cooling, the gold diffusion increases the stiffness of the resonating structure slightly, which reflects as an upward shift in resonance frequency. Thus, silicon resonators can be permanently trimmed to a desired frequency value by an electrical calibration step. As a proof of concept, an upward frequency shift of 240 kHz is demonstrated for a 4000 mass loaded 100 MHz SiBAR after one hour of Joule heating with 30 mA of DC current.

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A 145MHz low phase-noise capacitive silicon micromechanical oscillator

Cited by 24 publications

References 5 publications

An Empirical Phase-Noise Model for MEMS Oscillators Operating in Nonlinear Regime

An Empirical Phase-Noise Model for MEMS Oscillators Operating in Nonlinear Regime

RF MEMS/NEMS resonators for wireless communication systems and adsorption-desorption phase noise

Post-Fabrication Electrical Trimming of Silicon Bulk Acoustic Resonators using Joule Heating

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