A 184nW, 121µg/√Hz Noise Floor Triaxial MEMS Accelerometer with Integrated CMOS Readout Circuit and Variation-Compensated High Voltage MEMS Biasing

Peng, Yutian; Jeong, Seokhyeon; Choo, Kyojin; Kim, Yejoong; Chen, Liyu; Rothe, Rohit; Xu, Li; Gurin, Ilya; Oliaei, O.; Tsinker, Vadim; Bart, Stephen F.; Hartwell, P.G.; Blaauw, David; Sylvester, Dennis

doi:10.1109/vlsitechnologyandcir46769.2022.9830230

Cited by 5 publications

(4 citation statements)

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“…As can be seen from the table, this work has achieved a better FoM compared to others, apart from Refs. [7,28]. Ref.…”

Section: Resultsmentioning

confidence: 99%

“…Ref. [7] benefits from a static high-voltage bias but sacrifices the ability to detect the DC signal. Ref.…”

Section: Resultsmentioning

confidence: 99%

“…Gain error deterioration and thermal noise deterioration are typical problems As can be seen from the table, this work has achieved a better FoM compared to others, apart from Refs. [7,28]. Ref.…”

Section: Discussionmentioning

confidence: 99%

“…MEMS capacitive accelerometers play an important role in inertial measurement units [1][2][3], platform stabilization systems [4][5][6][7][8][9][10], structural health monitoring [11][12][13][14][15], and tilt sensing [16,17]. In these applications, the MEMS capacitive accelerometers are powered by batteries; thus, high power efficiency is required to extend the battery life.…”

Section: Introductionmentioning

confidence: 99%

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High-Power-Efficiency Readout Circuit Employing Average Capacitance-to-Voltage Converter for Micro-Electro-Mechanical System Capacitive Accelerometers

Li,

Lai,

Wang

et al. 2023

Sensors

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A capacitance-to-voltage converter (CVC) is proposed in this paper and applied to a readout circuit for a micro-electro-mechanical system (MEMS) accelerometer to improve the power efficiency. In a traditional readout circuit, the front-end CVC has to operate at a high sampling frequency to resist thermal noise deterioration due to the large parasitic capacitance introduced by the mechanical sensing element. Thus, the back-end analog-to-digital converter (ADC) also has to operate at a high sampling frequency to avoid noise aliasing when sampling the output signal of the CVC, which leads to high power consumption. The average CVC technique is proposed in this paper to reduce the sampling frequency requirement of the back-end ADC and thus reduce the power consumption. Both the traditional readout circuit and the proposed readout circuit are simulated with a commercial 0.18 μm BCD process. The simulation results show that noise aliasing occurs, and the noise power spectral density (PSD) of the traditional readout circuit increases by 12 dB when the sampling frequency of back-end ADC is reduced by 24 dB. However, in the proposed readout circuit, a noise aliasing effect does not occur. Moreover, the proposed readout circuit reduces the power consumption by 53% without thermal noise deterioration. In addition, the proposed CVC circuits are fabricated in an 0.18 μm BCD process, and the test results show that the presented readout circuit based on the average CVC technique can obtain better performance than the traditional CVC-based readout circuit.

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“…As can be seen from the table, this work has achieved a better FoM compared to others, apart from Refs. [7,28]. Ref.…”

Section: Resultsmentioning

confidence: 99%

“…Ref. [7] benefits from a static high-voltage bias but sacrifices the ability to detect the DC signal. Ref.…”

Section: Resultsmentioning

confidence: 99%

Section: Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

High-Power-Efficiency Readout Circuit Employing Average Capacitance-to-Voltage Converter for Micro-Electro-Mechanical System Capacitive Accelerometers

Li,

Lai,

Wang

et al. 2023

Sensors

View full text Add to dashboard Cite

show abstract

Ultrahigh-G Accelerometer Readout IC with Adaptive Gain Path for Shock Resilience

Cheon,

Park,

Choi

et al. 2024

2024 IEEE International Symposium on Circuits and Systems (ISCAS)

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An Ultralow-Power Triaxial MEMS Accelerometer With High-Voltage Biasing and Electrostatic Mismatch Compensation

Peng,

Jeong,

Choo

et al. 2024

IEEE J. Solid-State Circuits

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A 184nW, 121µg/√Hz Noise Floor Triaxial MEMS Accelerometer with Integrated CMOS Readout Circuit and Variation-Compensated High Voltage MEMS Biasing

Cited by 5 publications

References 0 publications

High-Power-Efficiency Readout Circuit Employing Average Capacitance-to-Voltage Converter for Micro-Electro-Mechanical System Capacitive Accelerometers

High-Power-Efficiency Readout Circuit Employing Average Capacitance-to-Voltage Converter for Micro-Electro-Mechanical System Capacitive Accelerometers

Ultrahigh-G Accelerometer Readout IC with Adaptive Gain Path for Shock Resilience

An Ultralow-Power Triaxial MEMS Accelerometer With High-Voltage Biasing and Electrostatic Mismatch Compensation

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