A X-band variable gain amplifier (VGA) with low phase variation and high control resolution is presented in 180-nm CMOS. The linear gain VGA and current-type digital-toanalog converter (DAC) are implemented to improve the accuracy of gain control and the robustness against process, supply voltage, and temperature variations (PVT). The measured peak gain and 3-dB bandwidth are 8 dB and 8.5 to 11.6 GHz, respectively. The gain range is 15 dB with a gain step of 1 dB. With a supply voltage varying from 1.6 to 2.0 V, the root-mean-square (RMS) gain and phase errors in 3-dB bandwidth are <0.62 dB and <1.5 , respectively. With supply of 1.8 V, the measured root-meansquare (RMS) gain and phase errors across −25 to 110 C are <0.65 dB and <1.7 , respectively. Comparing the measurement results of five chips, the variation of RMS gain error is <0.24 dB, and the RMS phase errors are almost the same. The measurement results demonstrate the proposed VGA is very suitable for phased arrays in X-band.