2021
DOI: 10.3390/ma14237396
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A 3D LTCC-Based Ceramic Microfluidic System with RF Dielectric Heating of Liquids

Abstract: The design, fabrication and functional evaluation of the radio-frequency dielectric heating of liquids in an LTCC-based ceramic microfluidic system are described and discussed. The device, which relies on the dielectric heating of liquids, was fabricated using a low temperature co-fired ceramic (LTCC) technology. A multilayered ceramic structure with integrated electrodes, buried channels and cavities in micro and millimetre scales was fabricated. The structure with the dimensions of 35 mm × 22 mm × 2.4 mm inc… Show more

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Cited by 3 publications
(1 citation statement)
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“…In multilayer ceramic, buried channels, conductive lines, and vias are added to perform various functions, from fluid mixing to passive and active thermal transfer [1][2][3][4][5][6][7][8][9]. Low-temperature cofired ceramics (LTCCs), and to a lesser degree high-temperature cofired ceramics (HTCCs), have been recognized as suitable materials for the fabrication of such structures [2][3][4][5][6][7][8][9][10]. LTCCs are most commonly glass-ceramic composite materials, while HTCCs are generally alumina with sintering aids [11].…”
Section: Introductionmentioning
confidence: 99%
“…In multilayer ceramic, buried channels, conductive lines, and vias are added to perform various functions, from fluid mixing to passive and active thermal transfer [1][2][3][4][5][6][7][8][9]. Low-temperature cofired ceramics (LTCCs), and to a lesser degree high-temperature cofired ceramics (HTCCs), have been recognized as suitable materials for the fabrication of such structures [2][3][4][5][6][7][8][9][10]. LTCCs are most commonly glass-ceramic composite materials, while HTCCs are generally alumina with sintering aids [11].…”
Section: Introductionmentioning
confidence: 99%