A 3MHz spoke gyroscope with wide bandwidth and large dynamic range

A combined comb / bulk mode gyroscope structure for enhanced sensitivity

“…Prototypes were measured to operate at frequencies of ~1.5 MHz, with quality factors of ~33,000, at a 10 mTorr vacuum level, and exhibit rate sensitivities of 0.31 μV/º/sec, corresponding to capacitance sensitivities of 0.43 aF/º/sec/electrode. The structure here exhibits lower sensitivity than the gyros presented in [1]- [3], mainly due to much smaller transducer gaps of the latter. However, based on the 3 m transducer gap results presented in this work, it is demonstrated that the gyro structure introduced here has the potential of yielding higher sensitivities than the devices in [1]- [3] if implemented in similar ≲200 nm gap technologies.…”

“…In [1]- [2], a circular disk architecture was introduced in "100" and "111" silicon, and a circular disk gyro with spokes was suggested in [3] -it combined flexural and bulk modes, and achieved a large dynamic range. Bulk mode gyros and resonators typically utilize very small transducer gaps (e.g., 200 nm) between the center resonating element and the electrodes (e.g., [1]- [4]).…”

A Novel Comb Architecture for Enhancing the Sensitivity of Bulk Mode Gyroscopes

“…However, based on the 3 μm transducer gap results presented in this work, this gyro structure has the potential of yielding higher sensitivities than the devices in [1–3], when implemented in similar ≾200 nm gap technologies. In order to present a meaningful comparison between the different devices, an appropriate figure of merit (FOM; is introduced: $\mathit{\text{FOM}}=italic[\mathit{\text{Sensitivity per Electrode}}italic]\times {\mathit{[}g\times {10}^6\mathit{]}}^2$…”

A mode-matching 130-kHz ring-coupled gyroscope with 225 ppm initial driving/sensing mode frequency splitting

“…For the n=2 mode, the resonance frequencies of the drive/sense modes in crystalline silicon are inherently different so that the mode-matching is difficult to realize, which necessitates (i) the change of ring width and truss location, or (ii) the fabrication in specific crystalline directions [2] [3]. In contrast, the resonance frequencies of the drive/sense modes are inherently identical in the n=3 mode [4] [5]; however the displacement of the n=3 mode is smaller than that of the n=2 mode so that the sensitivity becomes lower. Although the [8] have been adopted to alleviate the aforementioned trade-off, they introduce several new issues, such as bulky size of the device or low yield concern due to challenging fabrication processes.…”