2022
DOI: 10.1088/1674-1056/ac597d
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A 4×4 metal-semiconductor-metal rectangular deep-ultraviolet detector array of Ga2O3 photoconductor with high photo response

Abstract: In this work, a 4×4 beta-phase gallium oxide (β-Ga2O3) deep-ultraviolet (DUV) rectangular 10-fingers interdigital metal-semiconductor-metal (MSM) photodetector array of high photo responsivity is introduced. The Ga2O3 thin film is prepared through the metalorganic chemical vapor deposition technique, then used to construct the photodetector array via photolithography, lift-off, and ion beam sputtering methods. The one photodetector cell shows dark current of 1.94 pA, photo-to-dark current ratio of 6×107, photo… Show more

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Cited by 17 publications
(9 citation statements)
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“…[26,34] 69 The comprehensive performance comparison with the recently reported β -Ga 2 O 3 based PDs is shown in Table 1. [35,36] The results prove that the β -(Al 0.25 Ga 0.75 ) 2 O 3 passivated devices provide a comparable outstanding optoelectronic performance, especially detectivities and external quantum effects compared to the β -Ga 2 O 3 PDs.…”
Section: Resultsmentioning
confidence: 69%
“…[26,34] 69 The comprehensive performance comparison with the recently reported β -Ga 2 O 3 based PDs is shown in Table 1. [35,36] The results prove that the β -(Al 0.25 Ga 0.75 ) 2 O 3 passivated devices provide a comparable outstanding optoelectronic performance, especially detectivities and external quantum effects compared to the β -Ga 2 O 3 PDs.…”
Section: Resultsmentioning
confidence: 69%
“…Meanwhile, Zn x Mg 1−x O tends to undergo phase separation when the relative content of Mg meets the requirement for a wider band gap, and diamond only responds to light with wavelengths shorter than 225 nm. [3,4] Gallium oxide (Ga 2 O 3 ) has five different phases (α, β , γ, ε, and δ ), which endow it with an adjustable band gap in the range of 4.5 eV-5.3 eV, [5][6][7][8][9] precisely corresponding to the response light wavelength range below 280 nm. Among them, the monoclinic Ga 2 O 3 (β -Ga 2 O 3 ) is the most thermodynamically stable phase, with an intrinsic band gap of about 4.8 eV, good mobility (100 cm 2 /(V•s)) and a high breakdown field (8 MV/cm).…”
Section: Introductionmentioning
confidence: 99%
“…Although encountering the difficulties of p-doping and device processing, Ga 2 O 3 unfold its superiority before researchers' eyes around the world in terms of solarblind deep ultraviolet (DUV) photodetectors and high-power devices, owing to its appropriate properties in nature. [3][4][5] The E g of ∼ 4.9 eV allows Ga 2 O 3 to have strong absorbance in the DUV region, thus Ga 2 O 3 is quite suitable for constructing DUV photodetectors. [3,6] Currently, a great deal of researches has been focused on the photodetectors based on semiconducting Ga 2 O 3 materials.…”
Section: Introductionmentioning
confidence: 99%