1998
DOI: 10.1016/s0038-1101(98)00110-5
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A 42-GHz (fmax) SiGe-base HBT using reduced pressure CVD

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Cited by 2 publications
(1 citation statement)
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“…The success of growing pseudomorphic commensurate Si 1−x Ge x to form Si 1−x Ge x /Si heterostructures is a great technological advancement, as well as simulating Si-based technology research during the last two decades. The bandgap engineering of Si 1−x Ge x /Si heterostructures has resulted in the invention of many heterojunction-based devices which overperformed those processed on just pure Si [1][2][3][4]. There is, in addition, great global interest in growing high-quality pure Ge totally relaxed buffer layers on Si to be used as pseudosubstrates for the growth of tensilestrained Si as well as other III-V light-emitting compound semiconductors.…”
mentioning
confidence: 99%
“…The success of growing pseudomorphic commensurate Si 1−x Ge x to form Si 1−x Ge x /Si heterostructures is a great technological advancement, as well as simulating Si-based technology research during the last two decades. The bandgap engineering of Si 1−x Ge x /Si heterostructures has resulted in the invention of many heterojunction-based devices which overperformed those processed on just pure Si [1][2][3][4]. There is, in addition, great global interest in growing high-quality pure Ge totally relaxed buffer layers on Si to be used as pseudosubstrates for the growth of tensilestrained Si as well as other III-V light-emitting compound semiconductors.…”
mentioning
confidence: 99%