In this letter, an 820GHz down-converter based on subharmonic mixer and low noise amplifier (LNA) with low conversion loss and noise figure is proposed. To reduce the frequency of local oscillation (LO) signal, a 4 th subharmonic architecture is adopted for the mixer implementation. Meanwhile, to improve the isolation of the mixer, a low-loss matching network based on λ/4 resonators with ground shields is introduced in the terahertz (THz) signal path. Then, the 4-stage common-source LNA is utilized to amplify the down-conversion IF signal. Using a conventional 40-nm CMOS technology, the implemented THz down-converter exhibits 9.9dB conversion loss and 39.2dB noise figure with -6dBm LO input power at 820GHz. The core chip only occupies 0.74×0.25 mm 2 , while dissipating 28.6mW from 1.1V voltage supply.