Abstract:This paper presents two variants of a high step-up ratio charge pump for high voltage micro electro-mechanical system and condenser microphones. The implementations are based on an additive charge pump topology where respectively 46 and 57 cascaded stages are used to generate an output voltage of 182 V from a supply voltage of 5 V. The two charge pumps have been fabricated in a 180 nm SOI process with a breakdown voltage of more than 200 V and respectively occupy an area of 0.52 mm2 and 0.39 mm2. The charge pu… Show more
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