IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004.
DOI: 10.1109/iedm.2004.1419253
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A 65nm logic technology featuring 35nm gate lengths, enhanced channel strain, 8 Cu interconnect layers, low-k ILD and 0.57 μm/sub 2/ SRAM cell

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Cited by 141 publications
(77 citation statements)
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“…In this paper, however, the skin effect is neglected since the highest target frequency is 10 GHz, resulting in a skin depth of 0.65 µm for copper wires. Half the thickness of the highest metal layer for a 65 nm CMOS technology [17] is less than the skin depth, justifying the assumption of a uniform current distribution. In addition, with advancements in technology, the thickness of the metal layers is decreasing, making the skin effect less significant.…”
Section: Effective Resistancementioning
confidence: 99%
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“…In this paper, however, the skin effect is neglected since the highest target frequency is 10 GHz, resulting in a skin depth of 0.65 µm for copper wires. Half the thickness of the highest metal layer for a 65 nm CMOS technology [17] is less than the skin depth, justifying the assumption of a uniform current distribution. In addition, with advancements in technology, the thickness of the metal layers is decreasing, making the skin effect less significant.…”
Section: Effective Resistancementioning
confidence: 99%
“…3. A 1 x 1 mm 2 area of the top metal layer for a 65 nm CMOS [17] technology is chosen. The target frequency is 5 GHz.…”
Section: Optimal Width For Minimum Impedancementioning
confidence: 99%
“…ROM cells require a single bitline given that they are connected directly to Vcc/Vss, and hence their read speed is very high (differential signaling is not required). ROM cells require much smaller area than conventional 6-T SRAM cells [3,13]. Therefore, bitlines, Vcc and Vss wires could be laid out in a more compressed manner for ROM cells than for SRAM cells.…”
Section: Evaluation Methodologymentioning
confidence: 99%
“…Since CACTI does not model ROM cells needed for wordline signatures, we model them as SRAM cells. We have incorporated ROM cells based on regular SRAM cell designs [3,13], where bitlines are interleaved with Vcc and Vss lines as shown in Figure 2. ROM cells require a single bitline given that they are connected directly to Vcc/Vss, and hence their read speed is very high (differential signaling is not required).…”
Section: Evaluation Methodologymentioning
confidence: 99%
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