A 915 MHz/75 kW cylindrical cavity type microwave plasma chemical vapor deposition reactor with a ladder-shaped circumferential antenna developed for growing large area diamond films

Simulation-Based Development of a New Cylindrical-Cavity Microwave-Plasma Reactor for Diamond-Film Synthesis

“…The quartz windows, which were far away from the plasma and cooled by water-cooling cavity walls, could be effectively protected from etching and overheating from the plasma, according to this design. The sealing reliability of the reactor is provided by the pressure difference between the inside and outside of the cavity during the operation [19]. In addition, the gravity of the antenna could also enhance the sealing ability of the cavity.…”

“…PL emissions of a nitrogen-vacancy (N-V) defect could exist in two charge states, with (N-V) 0 centered at 575 nm and (N-V) − centered at 637 nm, respectively. A silicon vacancy (Si-V) − , on the other hand, centered at 737 nm, could be created by etching the quartz windows during CVD [19]. It was shown that the PL spectrum of the CVD diamond films grown by the newly developed MPCVD reactor was dominated by the Raman peak of the diamond centered at 573 nm, and other PL peaks were nearly negligible.…”

“…The tablet-quartz-window-type reactors employed quartz plates as microwave windows, which had a simple structure and could easily be fabricated. However, quartz windows of this type would be damaged by unwanted secondary plasma during the operation, and then cavity walls would be contaminated by SiO 2 [19,20]. Pleuler et al reported on the circumferential-antenna-type reactor, which combined the advantages of a CVD system with a high efficiency and compactness.…”

Growth and Characterization of Polycrystalline CVD Diamond Films Obtained by MWPACVD at High Power 2,45GHz Microwave Discharge

“…In the course of its history, the CVD diamond has been continuously improved either by the better understanding of growth kinetics or the development of better machines as technology advanced through the years [15][16][17] . MWPACVD has been of particular interest in this context once it is the most used and suitable technique to grow industrial scale large single crystal diamonds 18,19 and also high quality polycrystalline diamond coatings and wafers of different sizes and thicknesses [20][21][22] .…”

Microwave Plasma CVD Reactors for Growing Diamond in the Laboratory

“…If we consider potential energy to be zero inside the box (the following Figure 1 was taken from internet) and infinites at the boundaries, the all the energy associated with the particle is kinetic energy: 1/2mv Cylindrical configuration [4][5][6][7][8] is the obvious choice for creating standing microwaves, but there are ellipsoidal [9], conical [10][11][12], flat [13], truncated [14], dome [15] shaped reactors. As already mentioned 2.45GHz and 915MHz are two frequencies used for CVD chamber but there are patents to use variable frequencies [16].…”