A batch-fabricated non-reverse valve with cantilever beam manufactured by micromachining of silicon

Modeling and characterization of a nanoliter drug-delivery MEMS micropump with circular bossed membrane

“…In the small forward-flow region, the f iv -P iv curve can be closely fitted by a fourth-order polynomial [40]. However, in the large forward-flow region, the flow rate varies almost linearly in proportion to P iv .…”

Novel no-moving-part valves for microfluidic devices

“…The micropumps are key microfluidic devices applicable to chemical process control, drug delivery system, and cooling of tiny electrical elements (Ullmann and Fono 2002). The flow directing elements significantly affect the micropump characteristics, yet some active valves (Zdeblick and Angell 1987) and passive valves (Tiren et al 1989) are normally implemented for flow directing. However, for reliability concern, valveless design such as nozzle/diffuser element (Van De Pol 1989) has been devised.…”

Some Selected Research Items of the Micromechanics Department at Mesa

“…Also the good properties with respect to leakage are comparable. Similar to van Lintle's valves, the volume flow through the valve is proportional to ( A P )~ [25]. A dsadvantage of Tirkn's valves might be that realisation of a pretension is not so straightforward.…”

“…Test showed that these valves were tight: We could observe flow of a liquid against the opening of the valve only in those cases that the valves were contaminated by dust praticles. Valves designed by Tirkn et a1 [25] are used in pumps presented by Zengele et a1 [76,79,20]. In these valve cantilever beams are used in place of membranes with a ring, see fig.…”