1970
DOI: 10.1109/t-ed.1970.17095
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A boundary technique for calculation of distributed resistance

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Cited by 39 publications
(5 citation statements)
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“…For this stage, the discharge model and the fluid dynamic model were fully coupled. The plasma discharge model (equations ( 1)-( 4)) calculates the averaged statistical properties of the plasma particles by solving the continuity (equation ( 1)) and drift-diffusion equations (equation ( 2)) using the Scharfetter-Gummel method [33] for flux calculation with an adaptive time step. The Poisson equation (equation ( 3)) for electric field was solved using the LU triangular matrix decomposition [27].…”
Section: Governing Equations and Numerical Methodsmentioning
confidence: 99%
“…For this stage, the discharge model and the fluid dynamic model were fully coupled. The plasma discharge model (equations ( 1)-( 4)) calculates the averaged statistical properties of the plasma particles by solving the continuity (equation ( 1)) and drift-diffusion equations (equation ( 2)) using the Scharfetter-Gummel method [33] for flux calculation with an adaptive time step. The Poisson equation (equation ( 3)) for electric field was solved using the LU triangular matrix decomposition [27].…”
Section: Governing Equations and Numerical Methodsmentioning
confidence: 99%
“…An efficient experiment plan in those dimensions is then formed. The two-dimensional Laplace equation solver RESCAL [15] is used to calculate the capacitance of a single conductor, a pair of conductors, and three conductors over the field oxide region.…”
Section: Tcad Automated Interconnect Modelingmentioning
confidence: 99%
“…They are the key properties of the RCutSim trim simulator developed by the paper's authors. We also should mention a number of in-depth studies that resulted in the development of trim resistance estimation software or a full-fledged mathematical model [29][30][31][32].…”
Section: Introductionmentioning
confidence: 99%