A Bulk-Micromachined Fully Differential MEMS Accelerometer With Split Interdigitated Fingers

Aydin, Osman; Akın, Tayfun

doi:10.1109/jsen.2013.2264667

Cited by 21 publications

(11 citation statements)

References 11 publications

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“…When acceleration is applied to accelerometers, the mass moves deforming the spring, and the input acceleration is calculated by measuring the position of mass. [ 2 ] To measure the position, various accelerometers have been developed, such as capacitive, [ 3–14 ] piezoresistive, [ 15,16 ] resonant, [ 17,18 ] and optical [ 19,20 ] accelerometers. However, accelerometers with such microscale solid spring‐like silicon structures can suffer from mechanical fatigue.…”

Section: Introductionmentioning

confidence: 99%

Capacitive‐Type Two‐Axis Accelerometer with Liquid‐Type Proof Mass

Won

Huh

Lee

et al. 2020

Adv Elect Materials

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Utilizing the advantages of a liquid metal (LM) (i.e., mercury) and its electro‐mechanical properties (i.e., high density, high surface tension, and high electrical conductivity), a novel capacitive‐type two‐axis accelerometer is proposed. The device employs a liquid‐type proof mass (i.e., liquid metal droplet) and is located in a cone‐shaped guiding channel. The Laplace pressure induced by the guiding channel and the LM droplet in the device acts as a spring due to the high surface tension of LM. To accurately set the spring constant of the device, a 2D mathematical model is established. Based on this mathematical model, the influence of the channel shape on device sensitivity is analyzed. Despite measuring the two‐axis accelerations using a single proof mass, the accelerometer yields a cross‐axis sensitivity of less than 1% for the x‐ and y‐axes. The accelerometer demonstrates an output similar to that of a reference accelerometer for a randomly applied acceleration. Owing to the nature of the liquid‐type proof mass, even if it is destroyed, its functionality is recovered by simply shaking the accelerometer. Finally, a 1.4% change in the accelerometer output is observed in the 15 000‐cycle test, and the device is applied to a maze escape game for verification.

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Section: Introductionmentioning

confidence: 99%

Capacitive‐Type Two‐Axis Accelerometer with Liquid‐Type Proof Mass

Won

Huh

Lee

et al. 2020

Adv Elect Materials

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“…[114][115][116] Later, this concept was extended to build the accelerometer for nano-g precision. [117][118][119] Figure 12(c) shows a novel lamellar grating with tunable profile design for Fourier-transform spectrometer (FTS). [107] The driving coils were positioned under the device, while a permanent magnet was set perpendicular to the illustrated central platform.…”

Section: Mems Gratings With Tunable Profilementioning

confidence: 99%

MEMS gratings and their applications

Zhou

Lim

et al. 2021

International Journal of Optomechatronics

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Grating plays an essential role in various optical systems owing to its unique dispersion properties. In recent years, there is increasing demand to miniaturize optical systems for a wide range of field applications. Therefore, the integration of diffraction grating with MEMS technology provides an efficient way to build truly miniaturized optical systems. Till now, MEMS diffraction gratings have mainly been explored in two directions, namely MEMS scanning gratings and MEMS tunable gratings. MEMS scanning gratings are constructed with a variety of MEMS actuators to drive a grating platform to scan across the target, and they play a significant role in various scanning systems. Meanwhile, the dispersive properties of grating scanners make them attractive in wavelength sensing applications, including spectrometers and hyperspectral imaging systems. Tunable gratings typically employ MEMS actuators to dynamically change the diffraction properties, thus tuning its wavelength sensitivity for a specific application. Thus, this review will introduce these two types of MEMS gratings in detail and evaluate their efficiency and advantages in various fields.

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“…48 Thus, for any realistic acceleration force we do in our devices not expect delamination of the graphene from the substrate or the proof mass. Compared to state-of-theart silicon MEMS accelerometers, our NEMS accelerometer structures feature at least three orders of magnitude smaller proof masses, [49][50][51][52][53][54] while still providing useful output signals.…”

Section: Mems Nems Accelerometersmentioning

confidence: 99%

Suspended Graphene Membranes with Attached Silicon Proof Masses as Piezoresistive Nanoelectromechanical Systems Accelerometers

et al. 2019

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Graphene is an atomically thin material that features unique electrical and mechanical properties, which makes it an extremely promising material for future nanoelectromechanical systems (NEMS). Recently, basic NEMS accelerometer functionality has been demonstrated by utilizing piezoresistive graphene ribbons with suspended silicon proof masses. However, the proposed graphene ribbons have limitations regarding mechanical robustness, manufacturing yield, and the maximum measurement current that can be applied across the ribbons. Here, we report on suspended graphene membranes that are fully clamped at their circumference and have attached silicon proof masses. We demonstrate their utility as piezoresistive NEMS accelerometers, and they are found to be more robust, have longer life span and higher manufacturing yield, can withstand higher measurement currents, and are able to suspend larger silicon proof masses, as compared to the previous graphene ribbon devices. These findings are an important step toward bringing ultraminiaturized piezoresistive graphene NEMS closer toward deployment in emerging applications such as in wearable electronics, biomedical implants, and internet of things (IoT) devices.

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A Bulk-Micromachined Fully Differential MEMS Accelerometer With Split Interdigitated Fingers

Cited by 21 publications

References 11 publications

Capacitive‐Type Two‐Axis Accelerometer with Liquid‐Type Proof Mass

Capacitive‐Type Two‐Axis Accelerometer with Liquid‐Type Proof Mass

MEMS gratings and their applications

Suspended Graphene Membranes with Attached Silicon Proof Masses as Piezoresistive Nanoelectromechanical Systems Accelerometers

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