“…Two types of precursors having a total thickness of 500 nm with different laminated layers (six and nine layers) were used in the experiments for investigating the influence of precursor structure. The details of the preparation of precursors and the sulfurization technique were reported previously [35,36]. Effects on the material properties due to the difference in the final Ge composition were investigated by utilizing analyses such as a scanning electron microscopy (FE-SEM, Hitachi, S-4100), an electron probe microanalysis (EPMA; Shimadzu EPMA-1610), an X-ray diffractometry (XRD, Rigaku, RINT-2200V/PCSV, Cu Kα ray; λ = 1.5418 Å with a Bragg-Brentano θ − 2θ geometry at 40 kV, 30 mA), a laser Raman spectrometry (COMET-3504, an excitation source of λ = 532 nm, a 1800 line mm −1 grating), an optical transmittance measurement (Spectrophotometer, Shimadzu UV-3100), a heat-probe conductivity measurement, and a four-probe resistivity measurement (Kyowa Riken, K89PS, tips gap: 1 mm).…”