The extraction of the relative distribution of the primary generated vacancies, which have been produced by ionisation with electrons, that is, the vacancy distribution prior to the appearance of Coster Kronig transitions, is presented for the L‐subshells. Only fundamental parameters such as fluorescence yields, Coster Kronig transition probabilities, and relative intensities were used for the derivation. Furthermore, a closer look is taken at the energy dependence of these relative primary vacancy distributions.