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Abstract. 2014 A rigorous derivation of the characteristic fluorescence correction factor for use in electron probe microanalysis is presented. To achieve a high accuracy of the resulting expression Coster-Kronig transitions and effective fluorescence yields are taken into account and special attention is directed to the excitation conditions, e.g. the subshell structures. The integrations are carried out as accurately as possible, i.e. analytical solutions are employed if possible. Approximation and simplifications are avoided as far as possible.

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The extraction of the relative distribution of the primary generated vacancies, which have been produced by ionisation with electrons, that is, the vacancy distribution prior to the appearance of Coster Kronig transitions, is presented for the L‐subshells. Only fundamental parameters such as fluorescence yields, Coster Kronig transition probabilities, and relative intensities were used for the derivation. Furthermore, a closer look is taken at the energy dependence of these relative primary vacancy distributions.