Comparison of Simulated and Experimental Auger Intensities of Au, Pt, Ni and Si in Absolute Units

Wagner, Horst W.; Schiebl, Christian; Werner, Wolfgang

doi:10.1007/978-3-7091-6555-3_58

Cited by 4 publications

(3 citation statements)

References 14 publications

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“…28 were corrected for the analyser transmission function by means of the electron reflection method. 167 A partial intensity analysis was performed on these data prior to theoretical spectra calculated by first determining the depth profile from the raw measured data with a partial intensity analysis and then subsequently using Eqn (28). The parameter t in the right margin indicates the number of sputter cycles.…”

Section: Partial Intensity Analysismentioning

confidence: 99%

Electron transport in solids for quantitative surface analysis

Werner

2001

Surface & Interface Analysis

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316

276

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The influence of electron transport on the signal generation process in electron beam techniques is reviewed. A survey of the fundamental physical quantities for the electron-solid interaction is presented and sources for these quantities in the literature as well as semi-empirical formulae are given. The theoretical approaches used to describe multiple scattering in solids are outlined. These include the partial intensity approach and the continuous slowing down approximation to describe multiple energy losses and the transport approximation to tackle multiple deflections. A detailed description of the Monte Carlo technique is presented because this constitutes an effective means to study transport processes. The different theoretical approaches are illustrated in a survey of applications. These include: quantitative description of the surface sensitivity in Auger and photoelectron spectroscopy; line shape analysis of electron spectra; extracting information on the compositional depth profile from the combined energy/angular distribution in an electron spectrum; quasi-elastic electron reflection; inelastic electron backscattering; depth distribution of production of x-rays caused by electron bombardment; and the surface sensitivity in total electron yield electron spectroscopy. These applications demonstrate that the outlined approaches have a broad field of application, not only for electrons with energies ranging from thermal to the relativistic energy range, but also for other microbeam analysis techniques.

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Section: Partial Intensity Analysismentioning

confidence: 99%

Electron transport in solids for quantitative surface analysis

Werner

2001

Surface & Interface Analysis

Self Cite

316

276

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“…the peak areas agree well with the product of the backscattering factor and the ionization cross-section. 12,13 Subtraction of the remaining background in this way yields the spectra shown in Fig. 4(c).…”

Section: Resultsmentioning

confidence: 99%

“…the probability that a given collision is elastic, is given by Figure 2 shows the variation of i with s for di †erent emission angles k \ cos t, as per Eqn (12). The variation of i with u is found to be given by…”

Section: Theorymentioning

confidence: 98%