The relationship between capacitance and conductance of a MOSFET is examined in the region where velocity saturation dominates. In this domain it is shown that charge on the drain terminal (physically distinct from that in the channel) must be considered in order to keep the model from predicting the unphysical result that C,, is negative. It is also shown that, under the same assumptions, g, < C g g / 7 where g, is the transconductance, 7 is the transit time, and Cgg is the gate capacitance. Fig. 1. An n-channel MOSFET biased in saturation. The carriers are traveling at saturated velocity in the region from x,, to L .ECAUSE of its industrial importance, MOSFET capaci-B tance research has been the object of intense theoretical and experimental scrutiny for the last 25 years. The earliest work might be characterized as an attempt to develop rigorous three-terminal linear models by simplifying the results of distributed R C transmission line analyses. More recent work has had a number of foci, but the principle issue has been one of finding models suitable for large-signal circuit simulation. Thus we have seen investigations of charge conservation issues, generalizations to include the body terminal, results produced by device simulation, measurements on short-channe1 devices, and so on. Tsividis presents an extensive bibliography in [l]. Most of this work, though by no means all, has focused on the nonsaturation regime. Nevertheless, for analog circuit design and much of digital circuit design, when signals are being processed, MOSFET transistors are generally operated in saturation. By and large, the assumption used in analytical investigations has been that Cgd = Cd, = 0 for the intrinsic MOSFET in saturation. We have recently [2], [3] investigated linear dynamic models of the MOSFET using the classic figures of merit U , , , and U,,,[4]. One point that we found particularly striking and disturbing was that the models of Meyer [5], Ward and Dutton [6], and Paulos and Antoniadis [7] all predict that U , , and U,,, diverge to infinity as the MOS-FET approaches saturation [3]. Moreover, this divergence occurs even if a series resistance is added to the gate terminal or if a multisection (i.e., distributed) MOSFET model is used. The reason for this unphysical prediction is that all of these models predict that the impedance seen looking into the drain terminal at saturation is infinite.Clearly the output conductance of a MOSFET is not zero. There are, of course, extrinsic resistive parasitics such as the resistance of diffised active area (e.g., n+), contact resisManuscript received April 1, 1991; revised June 12, 1991. The author is with the Electronic Systems Technology Office, Defense IEEE Log Number 9102734. Advanced Projects Agency, Arlington, VA 22209.tance, and lightly doped drains. Since these effects are in series with the transistor's output conductance, they cannot be responsible for turning a zero output conductance into a nonzero output conductance. Moreover, while we would expect that extrinsic parasit...