A compact system for simultaneous measurement of linear and angular displacements of nano-stages

Kim, Jae Wan; Kang, Chu-Shik; Kim, Jong-Ahn; Eom, Tae Bong; Cho, Mijung; Kong, Hong Jin

doi:10.1364/oe.15.015759

Cited by 34 publications

(11 citation statements)

References 11 publications

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“…Interferometry applications that use a plane flat mirror with translation stage, and discrete photodetectors [ 12 – 15 ] or position sensitive device [ 16 ] will suffer erroneous measurements if the wave front angle is not limited to give acceptable modulation amplitude. This can be done by choosing an appropriate photodetector aperture width that is an order of magnitude less than the fringe line spacing.…”

Section: Discussionmentioning

confidence: 99%

Theoretical Analysis of Interferometer Wave Front Tilt and Fringe Radiant Flux on a Rectangular Photodetector

Smith

Fuss

2013

Sensors

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This paper is a theoretical analysis of mirror tilt in a Michelson interferometer and its effect on the radiant flux over the active area of a rectangular photodetector or image sensor pixel. It is relevant to sensor applications using homodyne interferometry where these opto-electronic devices are employed for partial fringe counting. Formulas are derived for radiant flux across the detector for variable location within the fringe pattern and with varying wave front angle. The results indicate that the flux is a damped sine function of the wave front angle, with a decay constant of the ratio of wavelength to detector width. The modulation amplitude of the dynamic fringe pattern reduces to zero at wave front angles that are an integer multiple of this ratio and the results show that the polarity of the radiant flux changes exclusively at these multiples. Varying tilt angle causes radiant flux oscillations under an envelope curve, the frequency of which is dependent on the location of the detector with the fringe pattern. It is also shown that a fringe count of zero can be obtained for specific photodetector locations and wave front angles where the combined effect of fringe contraction and fringe tilt can have equal and opposite effects. Fringe tilt as a result of a wave front angle of 0.05° can introduce a phase measurement difference of 16° between a photodetector/pixel located 20 mm and one located 100 mm from the optical origin.

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Section: Discussionmentioning

confidence: 99%

Theoretical Analysis of Interferometer Wave Front Tilt and Fringe Radiant Flux on a Rectangular Photodetector

Smith

Fuss

2013

Sensors

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“…Relevant commercial interferometers produced by Renishaw, Keysight and JENAer are mostly used for single parameter measurement. With the increasing requirements for measurement efficiency, multiparameter simultaneous measurement systems based on the principle of laser collimation [ 7 , 8 , 9 , 10 ] or the combination of collimation and interference [ 11 , 12 , 13 , 14 , 15 , 16 , 17 , 18 ] continue to emerge, and have become the current research trend. Although, multiparameter simultaneous measurement systems have improved efficiency compared to single-parameter measurement systems, in actual measurement, it is often necessary to adjust the installation positions of the measurement head and the target mirror according to the machine tool types.…”

Section: Introductionmentioning

confidence: 99%

“…However, based on this installation method, there are two different measurement modes in the measurement process due to the different types of machine tools. In general, the default measurement mode is the fixed measurement head, and the target mirror moves with the worktable or spindle [ 9 , 10 , 13 , 17 , 18 , 21 ]. This measurement mode is called measurement mode 1 in this paper.…”

Section: Introductionmentioning

confidence: 99%

Simultaneous Measurement of 6DOF Motion Errors of Linear Guides of CNC Machine Tools Using Different Modes

Jia

Zhang

Feng

et al. 2020

Sensors

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Based on the prior work on the six degrees of freedom (6DOF) motion errors measurement system for linear axes, and for the different types of machine tools and different installation methods, this study used a ray tracing idea to establish the measurement models for two different measurement modes: (1) the measurement head is fixed and the target mirror moves and (2) the target mirror is fixed and the measurement head moves. Several experiments were performed on the same linear guide using two different measurement modes. The comparative experiments show that the two measurement modes and their corresponding measurement models are correct and effective. In the actual measurement process, it is therefore possible to select the corresponding measurement model according to the measurement mode. Furthermore, the correct motion error evaluation results can be obtained.

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“…The 3D angular deformation involves pitch, yaw, and roll [1], [2], [5]. The roll angle refers to the angular change of the center line of the device itself, which has an important practical engineering significance for the measurement of roll deformation [6], [7].…”

Section: Introductionmentioning

confidence: 99%

Design of a Roll Angle Measuring Sensor

et al. 2020

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Aiming at the measurement of roll deformation between two devices, we propose a novel scheme and elaborate the structure design in this paper. The scheme can realize the relative measurement of roll angle even if the system does not provide a reference datum, which effectively solves the problems of limited measurement range of moiré fringes and accuracy guarantee only in an extremely small angle range. First, the principle of measuring the roll angle by moiré fringes is introduced, and the effects of various error sources in the system are comprehensively considered. Then, the combined measurement scheme and the entire system composition structure are analyzed in detail. In addition, an experimental setup is designed to verify the accuracy of roll deformation measurement. The measurement results show that the root mean square (RMS) error can reach 6.9" within 3°, and is less than 7.8" in the range of 0°-90°. Hence, our proposed scheme has a good measurement stability in a large roll range. INDEX TERMS Roll angle, measurement sensor, system structure design, error analysis, moiré fringe.

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A compact system for simultaneous measurement of linear and angular displacements of nano-stages

Cited by 34 publications

References 11 publications

Theoretical Analysis of Interferometer Wave Front Tilt and Fringe Radiant Flux on a Rectangular Photodetector

Theoretical Analysis of Interferometer Wave Front Tilt and Fringe Radiant Flux on a Rectangular Photodetector

Simultaneous Measurement of 6DOF Motion Errors of Linear Guides of CNC Machine Tools Using Different Modes

Design of a Roll Angle Measuring Sensor

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