A Comparative Analysis of Pressure Sensing Parameters for Two Dimensional Photonic Crystal Sensors Based on Si and GaAs

Abstract

A pressure sensor based on two dimensional photonic crystal structure is presented. The structure considered for sensing is a lattice of air holes surrounded by semiconductor material. A waveguide with central microcavity is formed by filling air holes with semiconductor material. The sensing principle depends upon the shifting of central wavelength of peak towards higher wavelength region when the pressure is raised. The proposed pressure sensor can work in the range 0-5 GPa. Using this structure, two semiconductors, Si and GaAs, have been taken for analysis. It is found that shifting of resonance wavelength with pressure is more pronounced in GaAs than Si. In the dynamic range 0-5 GPa, sensitivity for sensor with Si is estimated as 1.674 nm/GPa while it is 17.00 nm/GPa for sensor with GaAs. The quality factor and figure of merit (FOM) is also found to be higher for GaAs sensor.

Ultrahigh Sensitivity of a Plasmonic Pressure Sensor with a Compact Size

“…We compare the designed plasmonic pressure sensor with the published designs in Table 4. The designed structure displays the most heightened sensitivity (≈23.32 times) than compared to [50] to the best of our knowledge. In addition, the pressure (in the unit of Pa) applied to the designed sensor can be calculated based on the Equations ( 5) and (7).…”

“…Chaudhary et al presented a hydrostatic pressure sensor using photonic crystal fibers (PCFs) with a sensitivity of 0.0116 nm/MPa [49]. Dinodiya et al developed a photonic crystal's pressure sensor based on Si and GaAs and claimed that the obtained sensitivity could reach 17.00 nm/GPa [50]. Another approach based on a nanostructure grating can detect pressure ganging in 0-1 kPa [51].…”

Theoretical modelling of a deformation based concave square ring-square disc (SR-SD) silver structure for pressure sensing

“…As shown in figure 1 (inset), when a pressure P is applied on Pact, it bends down into the insulator cavity by a vertical displacement of d nm pursuant to the standard relation of beam bending. Considering Pact as a rectangular slab of length L= 350 nm and thickness WI =50 nm, the extent of deformation (d) as a result of the pressure applied (P) is expressed as [16] 𝑑 = 𝑃𝐿 4 2𝑌(𝑊 𝑠𝑟 ) 3 (1)…”

“…Among these, the pressure and temperature measurements are quite vital as they are frequently used in automobile industries and petrochemical hazard control, safety monitoring, medical diagnostics, and several other extents of human life [2]. The optical pressure sensors are comparatively more promising because of their safe operation, better efficiency, dynamic sensing range, most minor electromagnetic interference [3], etc. The pressure applied to an optical pressure sensor is effectively transduced into optical responses by exploring the linear relation between stress and the optical resonance properties of the system utilized.…”

“…Recently, optical plasmonic sensors of various geometries, such as nanoparticle array [9], photonic crystal structures [10], dielectric waveguides, MIM structures, and so on, have been investigated for pressure sensor applications [8]. Dinodiya et al reported a plasmonic sensor of photonic crystal made of Si and GaAs, with a sensing range of 0-5 GPa, and maximum sensitivity values of 1.674 nm/GPa (Si) and 17.00 nm/GPa (GaAs) obtained [3]. Min Suk Oh and his group designed a transparent and capacitive pressuresensor, and achieved the sensitivity of 0.4 kPa −1 [11].…”