2015
DOI: 10.1515/aee-2015-0044
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A comparison between cylindrical and cross-shaped magnetic vibration isolators: ideal and practical

Abstract: Abstract:In this paper a cross-shaped isolator consisting of cuboidal magnets and a cylindrical isolator are compared by resonance frequency to volume ratio and shape. Both isolators are capable of obtaining a low resonance frequency, i.e. 0.15 Hz and 0.01 Hz for the cross and cylinder, respectively. The volume of both isolators is comparable, only the shape is different, resulting in a tall structure with a small footprint for the cross and a flat with a large diameter cylindrical structure. A sensitivity ana… Show more

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Cited by 3 publications
(1 citation statement)
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“…However, the system structure will be very complex if air bearings are used in some measuring or machining equipment requiring a high vacuum condition [3], such as extreme ultraviolet lithography. In contrast, owing to the advantages of no mechanical contact, vacuum compatibility (no need of liquid or gas auxiliary equipment) and low natural frequency, passive magnetic levitation vibration isolators have drew increased interest in recent years [4][5][6][7][8][9][10][11][12][13][14][15].…”
Section: Introductionmentioning
confidence: 99%
“…However, the system structure will be very complex if air bearings are used in some measuring or machining equipment requiring a high vacuum condition [3], such as extreme ultraviolet lithography. In contrast, owing to the advantages of no mechanical contact, vacuum compatibility (no need of liquid or gas auxiliary equipment) and low natural frequency, passive magnetic levitation vibration isolators have drew increased interest in recent years [4][5][6][7][8][9][10][11][12][13][14][15].…”
Section: Introductionmentioning
confidence: 99%