A comparison of surface metrology techniques

Conroy, Mike; Armstrong, J. H.

doi:10.1088/1742-6596/13/1/106

Cited by 59 publications

(34 citation statements)

References 15 publications

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“…Furthermore, using this technique, the resolution is comparable with more expensive 3-D imaging techniques also used for fossils, as laser scanning (>50 µm), magnetic resonance imaging (>10 µm), neutron tomography (>30 µm). Also, using a distinct lens it can achieve micro-CT resolution (>1 µm) (Rahman and Smith, 2014;Sutton et al, 2014), considering that the current resolution limit for a white light image system is around 0.5 µm because diffraction effects limit the maximum possible resolution (Conroy and Armstrong, 2005).…”

Section: Discussionmentioning

confidence: 99%

A novel application of the white light/fringe projection duo: recovering high precision three-dimensional images from fossils for the digital preservation of morphology

Gutiérrez-García

Mosiño

et al. 2015

Palaeontologia Electronica

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There has been long historical interest in digital preservation of morphological features of biological materials, especially because often the preservation of sensitive molecules is critical for evolutionary studies. To this end, we successfully applied the recent advances of the fringe projection profilometry technique, in conjunction with white light and a new phase algorithm, to digitalize the shape of a fossil rodent hemimandible. We were able to generate a cloud of points in an array of data that allowed us to plot a three-dimensional (3-D) digital restoration of the entire fossil sample. The maximum resolution of this system is given by the diffraction limit (in the order of microns), and we show that this enhanced system can be used with objects in a range of 1-30 mm, minimizing the systematic errors induced by small vibrations or light fluctuations and, consequently, improving the signal-to-noise ratio of the recovered cloud data. This is a useful tool to preserve 3-D images of fossils and other biological objects for which rather detailed morphological information is required, like in research studies for biologists and paleontologists or, as in the present case, when researchers need a morphological replica because the sample will be destroyed for ancient DNA extraction.

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Section: Discussionmentioning

confidence: 99%

A novel application of the white light/fringe projection duo: recovering high precision three-dimensional images from fossils for the digital preservation of morphology

Gutiérrez-García

Mosiño

et al. 2015

Palaeontologia Electronica

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“…The optical detection system is shown in Figure 1a, including an LED light source, a lens system and a CCD (charge-coupled device) camera array with a long working distance objective lens. small-angle X-ray scattering metrology [26,27], atomic force microscopy [25,28], and stylus profiler [25,29]. It's a challenge for these methods to quickly detect such microstructures with the height of hundreds of microns during the fabrication processes.…”

Section: Methodsmentioning

confidence: 99%

“…For the detection of HARMS, the current methods include optical microscopy, white light interferometry [20,21], scanning electron microscopy (SEM) [22,23], optical scatterometry [24,25], small-angle X-ray scattering metrology [26,27], atomic force microscopy [25,28], and stylus 2 of 9 profiler [25,29]. It's a challenge for these methods to quickly detect such microstructures with the height of hundreds of microns during the fabrication processes.…”

Section: Introductionmentioning

confidence: 99%

Optical Detection Method for High Aspect Ratio Microstructures

Wei

Hou

et al. 2020

Micromachines

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High aspect ratio microstructures (HARMS) are of great importance for many application fields. Many defects are generated during the fabrication processes, especially in line microstructures, and it is necessary to examine the quality of the structures after each process. However, there is no suitable efficient nondestructive detection method to monitor microstructures during the fabrication processes. In this paper, an optical detection method capable of detecting the structures by analyzing the reflection of light on the line HARMS is proposed. According to the image of reflected visible light, this method can determine whether there are defects in structures, so as to realize efficient detection. Preliminary simulations and experiments have been performed to confirm the feasibility and validity of the proposed method for detecting line microstructures. This method is expected to obtain more information about microstructures by further optimizing system parameters.

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“…The firm produces this line of instruments under the designation Talysurf CCI. One of these instruments is Talysurf CCI6000 (Conroy & Armstrong, 2005;Cincio et al, 2008;Lukianowicz, 2010). The principle of operation of this instrument, shown in Fig.…”

Section: Interference Microscope With Mirau Objective Lensesmentioning

confidence: 99%