A Compensation Method for Nonlinear Vibration of Silicon-Micro Resonant Sensor

Abstract

A compensation method for nonlinear vibration of a silicon micro resonant sensor is proposed and evaluated to be effective through simulation and experimental analysis. Firstly, the parameter characterization model of the silicon micro resonant sensor is established, which presents significant nonlinearity because of the nonlinear vibration of the resonant beam. A verification circuit is devised to imitate the nonlinear behavior of the model by matching the simulation measurement error of the frequency offset produced by the circuit block with the theoretical counterparts obtained from the model. Secondly, the principle of measurement error compensation is studied, and the compensation method dealing with nonlinear characteristics of the resonant beam is proposed by introducing a compensation beam and corresponding differential operations. The measurement error, compensation rate, and measurement residual between the two scenarios that use single beam and double beams, respectively, are derived and are compared with their simulation and experimental counterparts. The results coincide with the predicted trend, which verifies the effectiveness of the compensation method.

Finite Differences for Recovering the Plate Profile in Electrostatic MEMS with Fringing Field

“…In the last decade, a high synergy between the skills of scientific research and the world of industry has emerged for the development of technologically transferable physicalmathematical models capable of formalizing the increasingly performing behaviors of micro-electro-mechanical systems (MEMS) [1][2][3]. Today, these devices are considered "intelligent" because they combine electrical, electronic, mechanical, optical and other behaviors, managing highly complex industrial processes [4][5][6][7][8][9]. Among these, electrostatic MEMS with parallel metal plates are widely used devices in the industry, as they are easy to construct and exhibit high versatility [1,10,11].…”

Coupled chaotic vibration during pressure detection of micro-resonant pressure sensor

“…Miandoab et al [16] proposed a new method to predict the chaotic vibration of the micro resonator, and developed a new technology that can be used for the design of such resonators. Li et al [17] proposed a compensation method to improve the stability of the sensor, and verified the effectiveness of this compensation method through relevant experiments and simulations. Han et al [18] designed a new cross shaped micro resonant pressure sensor structure, and studied the sensor's nonlinear vibration characteristics .…”

Electrostatic-Elastic MEMS with Fringing Field: A Problem of Global Existence

“…In recent years, scientific research has paid particular attention to the study of model descriptions with different levels of accuracy and detail, and to the behavior of microelectro-mechanical systems (MEMSs) [1,2]. They are devices of various kinds (mechanical, electrical, and electronic) integrated in a highly miniaturized form onto the same substrate of semiconductor material (for example, silicon [3][4][5]) that combine the electrical properties of the semiconductor with the opto-mechanical properties. These are therefore "intelligent" systems that combine electrical [6], electronic [7], fluid management [8], optical [9], biological [10], chemical [11], and mechanical [12] functions in small spaces, associating all the possible management functions of a process to sensors and actuators [13].…”