2018
DOI: 10.1109/ted.2018.2869670
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A Comprehensive Study of a Single-Transistor Latch in Vertical Pillar-Type FETs With Asymmetric Source and Drain

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Cited by 10 publications
(5 citation statements)
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“…The shell gate length ( L g ) and the Si channel thickness ( T Si ) were fixed to 500 nm and 200 nm, respectively. In vertical Si NW structure, an asymmetric doping concentration is unavoidable due to the different ion implantation energies for the top drain and bottom source regions [ 23 ]. Therefore, the doping concentrations of channel, source, and drain were modeled to 1 × 10 17 cm −3 , 5 × 10 19 cm −3 , and 1 × 10 20 cm −3 , respectively.…”
Section: Device Structure and Simulation Methodologymentioning
confidence: 99%
“…The shell gate length ( L g ) and the Si channel thickness ( T Si ) were fixed to 500 nm and 200 nm, respectively. In vertical Si NW structure, an asymmetric doping concentration is unavoidable due to the different ion implantation energies for the top drain and bottom source regions [ 23 ]. Therefore, the doping concentrations of channel, source, and drain were modeled to 1 × 10 17 cm −3 , 5 × 10 19 cm −3 , and 1 × 10 20 cm −3 , respectively.…”
Section: Device Structure and Simulation Methodologymentioning
confidence: 99%
“…The fabrication of VP‐FeFET can be proceeded by connecting the MFM capacitor to the vertical‐pillar‐type transistor using the BEOL process. [ 29,30 ] MFMIS is the equivalent gate stack of the VP‐FeFET, implying that the capacitance ratio between the ferroelectric film and gate insulator can be modulated by adjusting channel height without increasing the lateral footprint of the device.…”
Section: Concept Of Device and Model Calibrationmentioning
confidence: 99%
“…Various merits of the vertical channel can be observed, such as a higher cell area efficiency, stronger robustness against SCEs, and a larger degree of freedom in determining the channel length. [20][21][22][23][24][25][26][27] Different types of multiple-gate MOSFETs have been reported, 1,28,29) and the vertical-channel structure is actually found in one of these cases. Compared with the other types, the vertical-channel MOSFET has the smallest footprint and the most ideal current-voltage characteristics.…”
Section: Introductionmentioning
confidence: 99%