2019
DOI: 10.1063/1.5117189
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A continuously variable beam expander driven by ultrasonic motors

Abstract: A dynamic beam shaping system requires a variable beam expander. Three optical lenses form the core of the proposed beam expander, and two hollow ultrasonic motors are used to adjust the positions of two of the lenses. A polymer-based stator is introduced in the ultrasonic motors to decrease their weight, whereupon a prototype is machined and its performance is assessed. The beam expander starts and stops within 0.05 s, and the minimum positioning error is 0.03 µm by adjusting the motor speed. The presented ex… Show more

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Cited by 7 publications
(2 citation statements)
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“…These results imply the suitability of torsional/flexural vibrations for piezoelectric motors. In further studies, we would like to, as mentioned above, increase the working frequency into the inaudible range by shortening the vibrator's length [34,35]. Additionally, we will model the T/F motor and conduct structural optimization in the future [34,36].…”
Section: Discussionmentioning
confidence: 99%
“…These results imply the suitability of torsional/flexural vibrations for piezoelectric motors. In further studies, we would like to, as mentioned above, increase the working frequency into the inaudible range by shortening the vibrator's length [34,35]. Additionally, we will model the T/F motor and conduct structural optimization in the future [34,36].…”
Section: Discussionmentioning
confidence: 99%
“…An automatic continuously variable beam expander with two hollow ultrasonic motors as its actuators was used to expand a laser beam by between threefold and fivefold, and nanoscale positioning and high-precision beam shaping was achieved [284].…”
Section: Continuously Variable Beam Expandermentioning
confidence: 99%