The measurement of soil gas permeability is influenced by the temperature and pressure fluctuation in the low gas pressure region. In order to investigate these influences, a soil temperature-controlled apparatus connected to a low-gas-pressure supply equipment is proposed in this study. The low constant gas pressure is supplied by two Mariotte bottles, by which the airflow rate is measured. Meanwhile, the soil specimen is controlled by a temperature-controlled apparatus. During the test, the negative pore water pressure and volume change of the soil specimen are measured. Through the temperature-controlled apparatus, it is observed that as the temperature increases from 25 °C to 60 °C, there is a corresponding increase in soil sample porosity by 5.4%, while the negative pressure of pore water decreases by 11.1%. This can be attributed to the reduction in the surface tension of contractile skin caused by elevated temperatures. Furthermore, due to variations in gas viscosity with temperature, there was a significant decrease in the gas flow rate by 50.5%. And, the relationship between permeability and volumetric gas content at different temperatures in low-pressure regions well confirms the existing power-law model. In addition, the existence of a temperature-independent critical negative pore water pressure is observed, beyond which the intrinsic permeability remains constant. At 36 kPa of negative pore water pressure, the intrinsic permeability at 60 °C exhibits an 81.8% reduction compared to that at 25 °C. This decline in intrinsic permeability can be attributed to a diminished pore connectivity, resulting from elevated temperatures.